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Stationary vibration insulation system and method of controlling same

A vibration isolation system, static technology, applied in the direction of mechanical oscillation control, program control, general control system, etc., can solve the problem that the vibration isolation system cannot be infinitely installed with vibration isolators.

Pending Publication Date: 2020-10-27
集成动力工程股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] Each control unit is set for the maximum number of isolators connected, which means that an infinite number of isolators cannot be added to the vibration isolation system without replacing the control unit

Method used

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  • Stationary vibration insulation system and method of controlling same
  • Stationary vibration insulation system and method of controlling same
  • Stationary vibration insulation system and method of controlling same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0074] figure 1 A schematic diagram showing the basic configuration of a vibration isolation system 1 known in the prior art is shown.

[0075] The vibration isolation system 1 comprises a plurality of isolators 2a-2d comprising springs and supporting a load mechanism 4 arranged in a vibration-isolated manner.

[0076] The vibration-insulated load mechanism 4 can, for example, comprise a plate on which a machine (not shown) for processing semiconductor components is mounted in a vibration-isolated manner.

[0077] Each spacer 2a-2d comprises an actuator 5a-5d and a sensor 6a-6d. Vibrations of the vibration-isolated loading mechanism 4 and / or vibrations of the base of the insulating element coupled to the base are detected by the sensors 6 a - 6 d .

[0078] The sensors are connected to a central control unit 3 .

[0079] The control unit 3 calculates compensation signals for driving the actuators 5a-5d from the signals of the sensors 6a-6d.

[0080] This results in a star...

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PUM

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Abstract

The invention relates to a stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.

Description

technical field [0001] The invention relates to a static vibration isolation system, its control method and an isolator for the static vibration isolation system. [0002] The invention relates in particular to a static vibration isolation system on which is arranged a machine for processing semiconductor devices and / or nanostructured elements, in particular wafers, masks or display substrates, or for measuring semiconductor devices and / or nanostructured Structural elements of machines such as electron beam microscopes. [0003] In addition, laboratory equipment and / or medical equipment, such as imaging inspection equipment, such as magnetic resonance tomography (MRT), can also be arranged on the static vibration isolation system. Background technique [0004] Static vibration isolation systems are used in particular in the semiconductor industry to house processing machines, such as lithographic equipment, and measuring devices, such as electron beam microscopes, in order ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/067F16F15/03F16F15/023F16F15/027F16F15/00
CPCF16F15/067F16F15/03F16F15/023F16F15/027F16F15/002G05D19/02F16F15/022F16F9/50F16F15/0232F16F2228/066F16F2230/18G05B19/404G05B2219/39199G06F13/42G06F2213/3808
Inventor C·康拉德H·哈特格斯B·多拉克
Owner 集成动力工程股份有限公司