Welding device for ceramic plate and metal cylinder component

A welding device, metal technology, applied in the direction of electric heating device, tin feeding device, auxiliary device, etc., can solve the problems of not having the function of fixing the welding part, pressing and fixing the part that cannot be welded, dangerous welding accuracy, etc., to achieve convenient welding , to ensure accuracy and stability, to ensure the effect of precision

Active Publication Date: 2020-11-13
ANHUI UNIVERSITY OF TECHNOLOGY AND SCIENCE
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Most of the existing welding devices for ceramic plates and metal cylinders do not have the function of fixing the welded part, and the manual fixing method

Method used

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  • Welding device for ceramic plate and metal cylinder component
  • Welding device for ceramic plate and metal cylinder component
  • Welding device for ceramic plate and metal cylinder component

Examples

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Example Embodiment

[0030] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0031] See Figure 1-7 , An embodiment provided by the present invention: including heating furnace 1, heating furnace 1, heating furnace 1 is fixedly connected to the bottom of the inner wall of the workbench 2, the right side of the top of the workbench 2 is fixedly connected to the limit plate 4, the front of the workbench 2 Mounting blocks 5 are fixedly connected to both sides of the mounting block 5, the top of the mounting block 5 ...

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Abstract

The invention discloses a welding device for a ceramic plate and a metal cylinder component, and belongs to the field of welding equipment. The welding device comprises a heating furnace, a workbenchis fixedly connected to the bottom of the inner wall of the heating furnace, a limiting plate is fixedly connected to the right side of the top of the workbench, and mounting blocks are fixedly connected to two sides of the front surface of the workbench. The tops of the mounting blocks are rotationally connected with clamping lead screws, the top ends of the clamping lead screws are fixedly connected with adjusting hand wheels, and the clamping lead screws are in threaded connection with clamping plates. According to the welding device, the mounting blocks are fixedly connected to the two sides of the front face of the workbench, the clamping lead screws are rotationally connected to the tops of the mounting blocks, the adjusting hand wheels are fixedly connected to the top ends of the clamping lead screws, the clamping plates are in threaded connection with the clamping lead screws so that the ceramic plate can be fixed after the ceramic plate is placed in the heating furnace, the ceramic plate is prevented from being dislocated in the welding process, the welding accuracy is guaranteed, and an extrusion disc can prevent welding flux from overflowing from the filling position.

Description

technical field [0001] The invention relates to the field of welding devices, in particular to a welding device for a ceramic plate and a metal cylindrical part. Background technique [0002] An electrostatic chuck is used as a holding member for sucking a wafer and controlling the temperature of the wafer in a semiconductor manufacturing process. As such an electrostatic chuck, it is known that metal is bonded from the back side of a disc-shaped ceramic plate provided with gas introduction holes. Manufacture the gas introduction pipe, supply He gas to the adsorption surface of the wafer, etc., to improve the thermal conductivity of the electrostatic chuck. In the manufacturing process of the electrostatic chuck, welding technology is used to weld the ceramic plate and the metal cylinder of the electrostatic chuck. Welded connections, so a welding device is required to weld them. [0003] Most of the existing welding devices for ceramic plates and metal cylinders do not hav...

Claims

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Application Information

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IPC IPC(8): B23K3/00B23K3/04B23K3/06B23K3/08B23K103/00B23K103/18
CPCB23K3/00B23K3/087B23K3/04B23K3/0607B23K2103/18B23K2103/52
Inventor 王刚刘一贺杨云龙王秒赵禹
Owner ANHUI UNIVERSITY OF TECHNOLOGY AND SCIENCE
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