Scanning electron microscope automatic scanning method and system based on 3D point cloud

Abstract

The invention discloses a scanning electron microscope automatic scanning method and system based on 3D point cloud. The method comprises the following steps: acquiring geometric surface space point cloud data of a multi-curved-surface sample through 3D scanning equipment; selecting spatial point cloud data of an area, needing to be analyzed, of the sample; converting the point cloud data into point cloud data based on a scanning electron microscope space coordinate system through space coordinate system conversion, converting the converted point cloud data into a scanning electron microscopecontrol instruction according to sample analysis requirements, and enabling a scanning electron microscope to quickly complete multi-curved-surface sample scanning analysis according to the instruction. The system mainly comprises a sample 3D module, a space coordinate conversion module, a scanning track calculation module, a scanning electron microscope control module and the like. According to the method, the scanning electron microscope can be controlled to automatically and quickly complete the analysis work of the sample according to the irregular multi-curved-surface sample geometric surface space point cloud data obtained after 3D scanning so that the analysis time of the complex surface sample is effectively shortened, the working intensity is reduced, and the production efficiencyis improved.

Description

technical field [0001] The invention belongs to the technical field of scanning electron microscope automatic scanning, and relates to a scanning electron microscope automatic scanning method and system based on 3D point cloud, and in particular to a point cloud of multi-curved (or irregular) sample geometric surface acquired based on 3D scanning Automatic and fast scanning method and system for scanning electron microscope. Background technique [0002] As a precision analytical instrument, the scanning electron microscope plays an increasingly prominent role in the fields of metals, geology, new energy, semiconductors, etc. The scanning electron microscope is mainly used to analyze the microstructure and composition of the sample surface. For samples with flat surfaces, the scanning electron microscope can quickly complete the scanning work through human operation or automatic scanning procedures, such as figure 1 For the simple and regular curved surface sample shown, th...

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Problems solved by technology

Due to the complex and irregular surface structure of these irregular multi-surface samples, it is impossible to model them. Therefore, for such samples, scanning electron microscope staff who have received professional operation training and have certain operating experience are required. The shape and the area to be analyzed, manual adjustment of the movement and rotation of the sample, and the relevant parameters of the scanning electron microscope (accelerating voltage, probe current, working distance, etc.), not only the analysis time is long, the work intensity is high, and human factors cannot be avoided. analysis error

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