Structure for improving Q value of surface acoustic wave filter and manufacturing method

Abstract

The invention relates to a structure for improving the Q value of a surface acoustic wave filter and a manufacturing method, and belongs to the technical field of electronics. The structure comprisesa piezoelectric material substrate and a metal transducer electrode, wherein the metal transducer electrode is arranged on the piezoelectric material substrate; the metal transducer electrode comprises an intermittent metal adhesion layer, a metal filling layer and a metal covering layer, wherein the intermittent metal adhesion layer is arranged on the piezoelectric material substrate, the metal filling layer is filled in a gap of the intermittent metal adhesion layer, and the metal covering layer is arranged on the intermittent metal adhesion layer and the metal filling layer; the intermittent metal adhesion layer, the metal filling layer and the metal covering layer form a laminated structure. The structure for improving the Q value of the surface acoustic wave filter can be prepared byadopting photoetching, metal growth, stripping and chemical mechanical polishing methods; manufacturing stability of the filter is ensured, the Q value of the surface acoustic wave filter can be improved through structural design, and the structure is suitable for designing and manufacturing the surface acoustic wave filter with high stability and high Q value.

Description

technical field [0001] The invention relates to a structure and a manufacturing method for improving the Q value of an acoustic surface filter, and belongs to the field of electronic technology. Background technique [0002] With the advent of the 5G communication era, the communication frequency band continues to increase. As an important device at the front end of the radio frequency module in the communication hardware equipment, the filter is more and more valued by everyone for its size and performance. With its miniaturization and high performance, SAW filters play a huge role in miniaturized mobile communication equipment such as mobile phones, and are the well-deserved main force in filter products. [0003] The SAW filter is a radio frequency device made by growing transducer electrodes on the surface of piezoelectric crystals. In the past, its transducing electrodes were designed and manufactured using single-layer aluminum as the electrode, which has the characte...

AI Technical Summary

Problems solved by technology

It is a good solution to increase the adhesion of device electrodes by adding a layer of metal adhesion layer, but the metal of the adhesion layer is slightly lower in resistivity. As the operating frequency of the filter increases, the skin tends to The low resistivity of the adhesive layer will greatly affect the propagation of electromagnetic signals, resulting in ineffective energy consumption during the propagation process, which in turn affects the Q value of the SAW filter, making the entire communication system Reduced communication efficiency

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