Incident light angle continuous adjusting device and angle continuous adjusting method

Abstract

The invention discloses an incident light angle continuous adjusting device and an angle continuous adjusting method, the incident light angle continuous adjusting device comprises a plane mirror, anelectric rotary table and an off-axis oval mirror, and the plane mirror is fixed on the electric rotary table; the center of the reflecting surface of the plane mirror coincides with the rotating center of the electric rotating table, the reflecting surface of the plane mirror faces the inner wall of the off-axis oval mirror, a non-rotating oval conjugate reflecting surface is established on the off-axis oval mirror, and the non-rotating oval conjugate reflecting surface is provided with two focuses. Wherein one focus coincides with the center of the reflecting surface of the plane mirror, andthe other focus is converged to the to-be-measured surface of the sample. According to the device, the incident angle of the light path can be continuously adjusted within a certain angle range, thestructure is simple, the adjustment method in the implanted light path system is convenient, and the incident point of the light path can be ensured not to be fixed in the continuous adjustment process.

Description

technical field [0001] The invention relates to the technical field of laser light path adjustment, in particular to a device and a method for continuously adjusting the angle of incident light. Background technique [0002] The optical properties of optical films include spectral properties such as transmittance, reflectance, absorption and scattering. In the process of measuring the reflectivity, lasers with different wavelengths need to be introduced in the test process in some applications to test the reflectivity characteristics of optical films on the same or different optical components for different wavelength lasers. During the measurement process In the process, it is necessary to make the laser obliquely incident, which involves the adjustment of the laser incident angle, and the position of the convergence point needs to be kept fixed during the process of adjusting the laser incident angle, otherwise a large measurement error will be introduced. In the previous...

AI Technical Summary

Problems solved by technology

The angle adjustment mechanism required by the coaxial convergence method is very complicated, and it is also difficult to keep the position of the convergence point fixed during the adjustment process, and it cannot be adjusted in real time. Therefore, a better device for adjusting the incident angle of the laser is needed

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