Apparatus and method for surface shape correction of grazing optical element

Abstract

The invention discloses a surface correction device and method for a grazing optical element. The surface correction device for a grazing optical element includes at least two groups of torque applying components. The torque applying component includes a fixed structure and a driving structure; the fixed structure is used for contacting Or clamp the edge of the grazing-in primary mirror, apply the force transmitted by the driving structure to the grazing-in primary mirror and generate a moment on the grazing-in primary mirror, so that the surface shape of the grazing-in primary mirror changes; all torque-applying components The resultant of the forces applied to the grazing primary mirror is zero. The surface shape correction device of the grazing optical element provided by the present invention is simple in structure, and the resultant force of the force exerted by all the moment applying components on the grazing primary mirror is zero during use, which will not affect the original grazing primary mirror. The fixed position ensures the singleness of the variable and is convenient for adjustment and control; in addition, in the process of correcting the surface shape of the grazing-in primary mirror, it is not necessary to disassemble the grazing-in primary mirror, which is convenient and easy to operate.

Description

technical field [0001] The invention relates to the technical field of optical element correction, in particular to a surface shape correction device of a grazing type optical element. In addition, the present invention also relates to a method applied to the surface shape correction device of the above-mentioned grazing optical element. Background technique [0002] Within an acceptable range of cost, better control of the wavefront quality can better accomplish the initial scientific goals. In the case of considering factors such as processing technology, environmental adaptability, and the influence of assembly technology, it is increasingly difficult for the accuracy maintenance capability of the system itself to meet the imaging quality requirements of future precision optical equipment. Taking the lithography machine as an example, in order to achieve the diffraction limit, the optical error of the system itself needs to be close to negligible. This requirement is alm...

AI Technical Summary

Problems solved by technology

[0005] The size of the primary mirror of the grazing-type telescope in the prior art is small, and when its surface shape does not meet the requirements, it is usually corrected by replacement. However, with the increase of the telescope aperture, the existing replacement methods have been no longer practical

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