Grazing-in type optical element surface shape correction device and method

Abstract

The invention discloses a grazing-in type optical element surface shape correction device and a method. The grazing-in type optical element surface shape correction device comprises at least two groups of moment applying assemblies, and each moment applying assembly comprises a fixing structure and a driving structure; the fixing structure is used for contacting or clamping the edge of a grazing-in type primary mirror, applying force transmitted by the driving structure to the grazing-in type primary mirror and generating torque on the grazing-in type primary mirror, so that the surface shapeof the grazing-in type primary mirror is changed; and the resultant force of forces applied to the grazing-in type primary mirror by all the torque applying assemblies is zero. The grazing-in type optical element surface shape correction device is simple in structure, the resultant force of force applied to the grazing-in type primary mirror by all the torque applying assemblies in the using process is zero, the original fixing position of the grazing-in type primary mirror cannot be affected, the unicity of variables is guaranteed, and adjustment and control are convenient; besides, in the process of correcting the surface shape of the grazing-in type primary mirror, the grazing-in type primary mirror does not need to be disassembled, and operation is convenient and easy.

Description

technical field [0001] The invention relates to the technical field of optical element correction, in particular to a surface shape correction device of a grazing type optical element. In addition, the present invention also relates to a method applied to the surface shape correction device of the above-mentioned grazing optical element. Background technique [0002] Within an acceptable range of cost, better control of the wavefront quality can better accomplish the initial scientific goals. In the case of considering factors such as processing technology, environmental adaptability, and the influence of assembly technology, it is increasingly difficult for the accuracy maintenance capability of the system itself to meet the imaging quality requirements of future precision optical equipment. Taking the lithography machine as an example, in order to achieve the diffraction limit, the optical error of the system itself needs to be close to negligible. This requirement is alm...

AI Technical Summary

Problems solved by technology

[0005] The size of the primary mirror of the grazing-type telescope in the prior art is small, and when its surface shape does not meet the requirements, it is usually corrected by replacement. However, with the increase of the telescope aperture, the existing replacement methods have been no longer practical

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