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Grinding wheel with one rough groove and four fine grooves and application thereof

A technology of grooves and grinding wheels, which is applied to bonding grinding wheels, parts of grinding machine tools, and machine tools suitable for grinding the edge of workpieces, etc. Achieve productivity, ensure effectiveness and stability, and improve efficiency

Inactive Publication Date: 2020-11-27
上海中欣晶圆半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the traditional grinding wheel manufacturing method is to combine rough grinding and finishing grooves on the same grinding wheel. As far as the current industry is concerned, T-type grinding wheels and R-type grinding wheels are generally as follows figure 1 1 rough-grinding groove + 3 fine-grinding grooves shown, that is, there are 4 grooves on one grinding wheel, but this combination of grinding wheel chamfering type faces a great waste of resources, because 1 rough-grinding groove The service life of the grinding wheel is greater than the service life of the three lapping grooves. When the service life of the lapping groove ends, the rough lapping groove can actually continue to be used. There is a problem that the life of the rough grinding wheel does not match the life of the lapping wheel.

Method used

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  • Grinding wheel with one rough groove and four fine grooves and application thereof
  • Grinding wheel with one rough groove and four fine grooves and application thereof
  • Grinding wheel with one rough groove and four fine grooves and application thereof

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings.

[0027] 1. Design drawing of grinding wheel

[0028] According to the appearance size of the existing grinding wheel, redesign the groove spacing and groove width of the grinding wheel, and rationally optimize the 1 coarse + 3 fine grooves to 1 coarse + 4 fine grooves. The drawings are as follows figure 2 shown.

[0029] The material of the groove is mainly to bond the diamond to the surface of the groove through a binder (mainly composed of Co, Cu, etc.), and to perform chamfering through the contact between the diamond and the surface of the silicon wafer.

[0030] Grinding wheel appearance size: outer diameter 202±0.5mm, thickness 20±0.02mm.

[0031] The rough and fine grinding groove angle is 11±0.5°; the rough and fine grinding groove depth is 1.0±0.1mm.

[0032] The groove spacing and groove width are shown in Table 1:

[0033] Table 1

[0034]

[0035] 2...

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Abstract

The invention discloses a grinding wheel with one rough groove and four fine grooves. The grinding wheel comprises a grinding wheel body, wherein the outer diameter of the grinding wheel body ranges from 200 mm to 210 mm; the thickness of the grinding wheel body ranges from 18 mm to 25 mm; one rough grinding groove and four fine grinding grooves are formed in the grinding wheel body in sequence; the distance between the rough grinding groove and the adjacent fine grinding groove is 1.8 + / -0.02 mm; the distance between every two adjacent fine grinding grooves is 1.8 + / -0.02 mm; the width of therough grinding groove is 2.3 + / -0.02 mm; and the widths of the fine grinding grooves are 1.7 + / -0.02 mm. The width of a traditional fine grinding groove is not changed, and the grinding effectivenessand stability of the fine grinding grooves are guaranteed; the width of the rough grinding groove and the distance between the grooves are optimized, the grinding wheel grooves are optimized again onthe premise that the quality of the chamfered surface is guaranteed, and the grinding wheel has high practicability in actual production and machining.

Description

technical field [0001] The invention belongs to the field of chamfering processing of silicon wafers, in particular to a grinding wheel with one rough and four fine grooves and its application. Background technique [0002] At present, the traditional grinding wheel manufacturing method is to combine rough grinding and finishing grooves on the same grinding wheel. As far as the current industry is concerned, T-type grinding wheels and R-type grinding wheels are generally as follows figure 1 1 rough-grinding groove + 3 fine-grinding grooves shown, that is, there are 4 grooves on one grinding wheel, but this combination of grinding wheel chamfering type faces a great waste of resources, because 1 rough-grinding groove The service life of the grinding wheel is greater than the service life of the three lapping grooves. When the service life of the lapping groove ends, the rough lapping groove can actually continue to be used. There is a problem that the life of the rough grindi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24D7/02B24D7/14B24B41/04B24B9/06
CPCB24B9/065B24B41/04B24D7/02B24D7/14
Inventor 卢运增贺贤汉洪漪王庆荣
Owner 上海中欣晶圆半导体科技有限公司
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