Nanometer pipe inner and outer film meteorological furnace deposition equipment
A technology of inner and outer membranes and nanotubes is applied in the field of vapor deposition equipment for nanotube inner and outer membranes in meteorological furnaces, which can solve the problems of high equipment cost, easy corrosion of nozzles, and precise control of coating amount, and achieves the effect of simple structure and low cost.
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[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0015] refer to Figure 1-2 , a kind of gas furnace vapor deposition equipment for inner and outer films of nanotubes, comprising an upper furnace 11, a middle furnace 12, a lower furnace 13 and a bottom furnace 14, an upper furnace 11, a middle furnace 12, a lower furnace 13 and a bottom furnace The periphery of the furnace 14 is covered with an insulating body 15, and the lower part of the insulating body 15 is provided with a feed air inlet 16. The upper fu...
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