Local vacuum coating equipment for inner wall of bulb glass shell
A technology of partial vacuum and coating equipment, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., and can solve the problems of high risk and high production cost
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[0020] The specific implementation manner of the present invention will be described in more detail below with reference to schematic diagrams. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0021] figure 1 It is a schematic diagram of the local vacuum coating equipment on the inner wall of the bulb glass bulb provided by an embodiment of the present invention, figure 2 It is an installation diagram of an evaporation boat provided by an embodiment of the present invention, image 3 is a cross-sectional view of a shielding device provided by an embodiment of the present invention, Figure 4 It is a top view of the shielding device provided by an embodiment of the present invention, see Figure 1-...
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