Flexible pressure sensor with microstructure
A pressure sensor and microstructure technology, applied in the field of sensors, can solve the problems of high sensitivity and wide linear response range, and achieve the effect of strong anti-deformation ability and widening application range.
Active Publication Date: 2022-02-15
SHENZHEN INST OF ADVANCED TECH
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Problems solved by technology
[0005] In view of the deficiencies in the prior art, the present invention provides a flexible pressure sensor with a microstructure, which can solve the problem of high sensitivity and wide linear response range in traditional pressure sensors and ensure that the sensor has good performance
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[0026] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0027] refer to figure 1 , is a structural schematic diagram of the flexible pressure sensor of the embodiment of the present invention. The flexible pressure sensor of this embodiment mainly includes an upper substrate 10, a lower substrate 20, and a microstructure array 30, wherein the upper substrate 10 and the lower substrate 20 face each other and are arranged at intervals, and the microstructure array 30 is an insulating dielectric layer located on the upper substrate. between the substrate 10 and the lower substrate 20 . The microstructure array 30 includes a plurality of microstructure...
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Abstract
The invention discloses a flexible pressure sensor with a microstructure, which comprises an upper substrate and a lower substrate facing each other and arranged at intervals and an insulating microstructure array between the two. The microstructure array includes several arrays arranged on The microstructure of the inner surface of the upper substrate, the microstructure extends toward the lower substrate, and is used for deforming in contact with the lower substrate in the process of being pressed; the microstructure includes a first part arranged on the inner surface of the upper substrate and a second part connected to the free end of the first part, the first part is a prism, the end surface of the second part is a cylindrical surface tangent to the first part, and the modulus of elasticity of the second part is smaller than that of the first part Part of the modulus of elasticity. The microstructure of the present invention is designed to have a first part and a second part connected to each other, and the two parts have different shape structures and elastic moduli, so that the microstructure has both high sensitivity and wide linear response range, and widens the pressure sensor. application range.
Description
technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible pressure sensor with a microstructure. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools , pipeline and many other industries. [0003] In recent years, due to the good biocompatibility of flexible sensors and a series of advantages such as wearability, real-time monitoring, and non-invasiveness, the development of flexible pressure sensors has gradually become a research hotspot, which can convert subtle mechanical information into Electroresponse has broad application prospects in the fields of human-computer interaction, electronic ...
Claims
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IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12
Inventor 李鑫陈明王宗朋刘奥星徐国良王忠国贾美玲杨春雷
Owner SHENZHEN INST OF ADVANCED TECH