Device for precisely preparing mixed gas of liquid MO source and hydrogen

Abstract

The invention provides a device for precisely preparing mixed gas of a liquid MO source and hydrogen. The device comprises a hydrogen source, a receiving bottle and a gasification device, wherein thehydrogen source is connected to the receiving bottle through a gas delivery pipe, the gasification device is arranged at the position, between the hydrogen source and the receiving bottle, of the gasdelivery pipe, and a quantifying device is arranged between the hydrogen source and the gasification device. The input of the liquid MO source with the required preparation concentration is controlledthrough the quantifying device, a mixing device is arranged in the receiving bottle, and gas in the receiving bottle is mixed through the mixing device. The problem that the liquid MO source is quantitatively transferred to a steel cylinder is solved. The pipeline replacement step and the material transfer step are combined, the safety is guaranteed, 100% transfer of materials is also guaranteed,and concentration control is good. The device is more precise and higher in quality, the preparation efficiency of the mixed gas is greatly improved, and the safety risk and the quality risk are reduced.

Description

technical field [0001] The invention relates to the field of electronic grade mixed gas production, in particular to a device for accurately preparing liquid MO source and hydrogen mixed gas. Background technique [0002] When manufacturing a liquid MO source, it is necessary to quantitatively transfer the liquid MO source. At present, the quantitative transfer of the liquid MO source is generally done by sealing the MO source with a glass ampoule and directly placing it in a steel cylinder. Broken ampoules are rolled to make the sample gas evenly mixed, but this is a waste of glass ampoules, and in the initial operation, all replacement operations are manual operations, which lacks time efficiency and poses quality and safety hazards ; Quantitative weighing of liquid MO sources is generally carried out in a glove box, the atmosphere impurities are difficult to control, and the pressure in the box will also affect the weighing accuracy; multi-step operation, handling increas...

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Problems solved by technology

[0003] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a device for accurately preparing a liquid MO source and a hydrogen gas mixture. Hydrogen is added through the hydrogen source, and the gasification device gasifies the diethyl tellurium liquid MO source. into the receiving bottle to automatically complete the transfer of the liquid MO source, and through the cooperation of the pressure detection control device and the weighing device, the weight of the liquid MO source is detected to achieve quantitative transfer, which solves the problem of difficult quantitative transfer when preparing the liquid MO source And the problem that the weighing accuracy is not easy to control

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