Temperature sensor

A technology of temperature sensor and sensitive film, which is applied in thermometers, instruments, and thermometers based on the expansion/contraction of materials, etc., can solve problems such as complex structures, and achieve the effects of high precision, improved detection sensitivity, and simple structure

Active Publication Date: 2020-12-18
SOUTHEAST UNIV
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  • Abstract
  • Description
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Problems solved by technology

The thermocouple temperature sensor has a fast response speed and can measure rapidly changing temperatures, but the structure is more complicated, while t

Method used

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Embodiment Construction

[0010] The present invention will be further explained below in conjunction with the accompanying drawings.

[0011] Such as figure 1 , figure 2 As shown, a temperature sensor includes a substrate 1, two thermally driven V-shaped beam structures, a frame-shaped mechanical metamaterial structure, and a strain-sensitive thin film 2. There are several anchor points on the base plate 1, and two heat-driven V-shaped beam structures are respectively located on both sides of the frame-shaped mechanical metamaterial structure, and are symmetrically arranged left and right. Wherein, the heat-driven V-shaped beam structure includes a pair of strip beams 3 and a strip connection block 4 between the pair of strip beams 3, one end of the strip beam 3 is fixedly connected with the strip connection block 4, and the strip beam The other end of 3 is fixedly connected with the anchor point 5 on the substrate. One ends of the two bar-shaped connecting blocks 4 are respectively connected to t...

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Abstract

The invention discloses a temperature sensor, and the sensor comprises a substrate, two thermally-driven V-shaped beam structures, a frame-shaped mechanical metamaterial structure and a strain sensitive film. The two thermally-driven V-shaped beam structures are located on the two sides of the frame-shaped mechanical metamaterial structure respectively. The strain sensitive film is located in thecenter of the frame-shaped mechanical metamaterial structure. When the ambient temperature changes, the suspended thermally-driven V-shaped beam expands or contracts under the influence of the temperature, the rigid insulation connecting wire is driven to drive the frame-shaped mechanical metamaterial structure to expand or contract in multiple directions, and expansion or contraction of the mechanical metamaterial structure is transmitted to the strain sensitive film through the rigid insulation connecting wire; the strain sensitive film converts multi-directional strain into resistance valuechange, and the ambient temperature is measured by detecting the resistance change, so the detection sensitivity of the device is greatly improved.

Description

technical field [0001] The invention relates to a temperature sensor and belongs to the technical field of microelectronic devices. Background technique [0002] A temperature sensor is a sensor that converts ambient temperature changes into electrical quantity changes. It can be divided into thermal resistance temperature sensors and thermocouple temperature sensors according to manufacturing materials and sensitive principles. The thermocouple temperature sensor has a fast response speed and can measure rapidly changing temperatures, but its structure is relatively complex, while the thermal resistance temperature sensor has a simple structure and convenient detection, and is currently the most widely used temperature detection method. With the development of microelectronics technology and integrated circuit industry, temperature sensors tend to be miniaturized and integrated. Micro temperature sensor is a new type of temperature sensor manufactured by MEMS technology. C...

Claims

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Application Information

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IPC IPC(8): G01K5/72G01K5/68
CPCG01K5/72G01K5/68
Inventor 韩磊吴承根
Owner SOUTHEAST UNIV
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