Superconducting nanowire structure and preparation method thereof

Abstract

The invention discloses a superconducting nanowire structure and a preparation method thereof, and provides the preparation method of the superconducting nanowire structure by using a bottom-to-top mode and adopting a side wall technology. The method which comprises the following steps: depositing a sacrificial layer on a substrate, removing part of the sacrificial layer and part of the substrate,forming a plurality of residual sacrificial layers and a plurality of substrate grooves with preset intervals, wherein each substrate groove is arranged between two residual sacrificial layers; depositing an isolation dielectric layer on the surface of each residual sacrificial layer and the surface of the substrate of the substrate groove, and removing a part of the isolation dielectric layer toform a plurality of residual isolation dielectric layers with preset intervals; removing a plurality of residual sacrificial layers through a corrosion method; cleaning the surface of the substrate,and extending the first superconducting nanowire and the second superconducting nanowire on the surface of the substrate to obtain a superconducting nanowire structure.

Description

Technical field[0001]The present invention relates to the field of semiconductor integration technology, in particular to a superconducting nanowire structure and a preparation method thereof.Background technique[0002]As a kind of single-photon detector, superconducting nanowire single-photon detector has the advantages of fast, accurate, high-efficiency, low dark count and corresponding wide spectrum. It has important application prospects and research value in the field of single-photon detection.[0003]The traditional superconducting nanowire single photon detector adopts a top-down method to realize superconducting nanowires through epitaxial deposition of superconducting materials, electron beam exposure, and etching. The etching will cause damage to the superconducting nanowires, and Electron beam exposure also has problems such as proximity effect. How to achieve a high-quality, high-duty-cycle superconducting nanowire structure is a problem that must be considered.Summary of ...

AI Technical Summary

Problems solved by technology

[0003] Traditional superconducting nanowire single-photon detectors use a top-down method to realize superconducting nanowires through epitaxial deposition of superconducting materials, electron beam exposure, and etching. Etching will cause damage to superconducting nanowires, and Electron beam exposure also has problems such as proximity effect

Images