A pressure sensor based on mechanical metamaterial structure

Abstract

The present invention provides a pressure sensor based on a mechanical metamaterial structure, comprising: a substrate, a pressure sensing unit, at least one thermal driving unit, a strain sensing unit, an anchor point group and a lead group arranged on the substrate, wherein the strain sensing unit includes a mechanical A metamaterial structure and a strain sensitive film, wherein the pressure sensing unit is electrically connected with at least one thermal driving unit through a lead group and an anchor point group to form a current path, and when the current in the current path changes, the thermal driving unit can generate a single directional strain, the mechanical metamaterial structure is connected with each thermally driven unit to convert single-directional strain into multi-directional strain, and the strain-sensitive film is electrically connected with the mechanical metamaterial structure to output resistance values ​​according to the multi-directional strain, through The resistance value is detected to realize the measurement of the pressure, thereby improving the sensitivity of the pressure sensor to the pressure.

Description

technical field [0001] The invention belongs to the technical field of pressure sensors, in particular to a pressure sensor based on a mechanical metamaterial structure. Background technique [0002] Pressure sensor is currently the most widely used sensor and plays an irreplaceable role in various industrial automation environments. Among the wearable electronic systems emerging in recent years, pressure detection technology runs through cutting-edge fields such as electronic skin, wrist pulse wave monitoring, and robotic hand tactile feedback. According to the different sensing mechanisms, pressure sensors can be divided into three categories, namely piezoelectric sensors, piezoelectric capacitive sensors and piezoresistive sensors. Under the development trend of device miniaturization, pressure sensors using MEMS technology have many advantages compared to traditional pressure sensors, such as small size, high precision, low power consumption, easy integration, and excel...

AI Technical Summary

Problems solved by technology

At the same time, as a necessary part of the Internet of Things, MEMS pressure sensors will also be further promoted and applied with the development of the information society. However, the current pressure sensors are large in size, low in sensitivity and resolution, and have large measurement errors. shortcoming

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