Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Traveling rail having traveling and guide function and pallet transport system using the same

A guiding function and track technology, applied in the direction of conveyors, conveyor objects, semiconductor/solid-state device manufacturing, etc., can solve the problems of foreign matter, pallet 10 shaking left and right, noise, etc., to save the manufacturing unit price, the pallet moves smoothly, The effect of improving durability

Pending Publication Date: 2021-02-02
BNS株式会社 +1
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] But as far as the prior art is concerned, the guide wheel 15-2 of the roller unit 15 is configured between the side wall surface 16-2 of the running track 16 and the track partition wall 16-3. There are still problems of vibration and noise caused by shaking from side to side at a distance S
[0012] That is, when the roller unit 15 of the prior art is attached and travels, a separation distance S occurs due to the gap between the guide wheel 15-2 of the roller unit 15 and the running rail, not only in the gap space foreign substances, and the tray 10 itself shakes from side to side, causing noise due to vibration. In addition, when inspection is carried out with the help of specific inspection equipment during transfer, a separation process occurs in which the entire tray 10 is lifted to the upper part and then lowered. situation, there are problems such as interference between the roller unit 15 and the running track 16

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Traveling rail having traveling and guide function and pallet transport system using the same
  • Traveling rail having traveling and guide function and pallet transport system using the same
  • Traveling rail having traveling and guide function and pallet transport system using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0103] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The relevant descriptions of the present invention are only examples for structural and functional descriptions, so the scope of rights of the present invention should not be construed as being limited by the embodiments described below. That is, the embodiments can be modified in various ways and have various forms, and therefore, the scope of rights of the present invention should be understood as including equivalents that can realize technical ideas.

[0104] On the other hand, the meanings of the terms described in the present invention should be understood as follows. Terms such as "first" and "second" are used to distinguish one constituent element from other constituent elements, and the scope of rights shall not be limited by these terms. For example, a first constituent element may be named a second constituent element, and similarl...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention relates to a traveling rail having a driving and guide function, which is for substrate transfer between processes. According to the present invention, the traveling rail havingdriving and guide functions in which multiple numbers are formed in a pallet transfer system for substrate transfer comprises: a flat rail pad which is an upper cross section; a rail inclined portioninclined to left and right and lower sides of the rail pad; and a foreign material receiving portion extending from the rail inclined portion to form a groove portion. Therefore, according to the present invention, the traveling rail can prevent a roller unit from being separated from the traveling rail by stably running the roller unit along the rail inclined portion due to the structure having the driving and guide functions at the same time.

Description

technical field [0001] The present invention relates to a running rail with running and guiding functions in a pallet transfer system and a pallet transfer system using the same, and more specifically, to a running rail with running and guiding functions and a pallet transfer system using the same. The roller unit is connected The tray used for substrate transfer between processes is equipped with guide rollers attached obliquely to the horizontal plane, and the roller unit is placed on a running rail with an inclined end surface. During the travel of the tray, the movement of the guide roller unit can prevent the guide roller from traveling The track is off. Background technique [0002] In general, diffusion, etching, photolithography, cleaning processes, and the like are performed in order to manufacture a semiconductor element. Each of these processes should be connected to the previous process, and after each process is completed, it should be transferred to the next p...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67703H01L21/6773H01L21/67706H01L21/67259H01L21/68764B65G49/061B65G2201/022
Inventor 吴珖根河在福
Owner BNS株式会社
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com