Traveling rail having traveling and guide function and pallet transport system using the same

Abstract

The present invention relates to a traveling rail having a driving and guide function, which is for substrate transfer between processes. According to the present invention, the traveling rail havingdriving and guide functions in which multiple numbers are formed in a pallet transfer system for substrate transfer comprises: a flat rail pad which is an upper cross section; a rail inclined portioninclined to left and right and lower sides of the rail pad; and a foreign material receiving portion extending from the rail inclined portion to form a groove portion. Therefore, according to the present invention, the traveling rail can prevent a roller unit from being separated from the traveling rail by stably running the roller unit along the rail inclined portion due to the structure having the driving and guide functions at the same time.

Description

technical field [0001] The present invention relates to a running rail with running and guiding functions in a pallet transfer system and a pallet transfer system using the same, and more specifically, to a running rail with running and guiding functions and a pallet transfer system using the same. The roller unit is connected The tray used for substrate transfer between processes is equipped with guide rollers attached obliquely to the horizontal plane, and the roller unit is placed on a running rail with an inclined end surface. During the travel of the tray, the movement of the guide roller unit can prevent the guide roller from traveling The track is off. Background technique [0002] In general, diffusion, etching, photolithography, cleaning processes, and the like are performed in order to manufacture a semiconductor element. Each of these processes should be connected to the previous process, and after each process is completed, it should be transferred to the next p...

AI Technical Summary

Problems solved by technology

[0011] But as far as the prior art is concerned, the guide wheel 15-2 of the roller unit 15 is configured between the side wall surface 16-2 of the running track 16 and the track partition wall 16-3. There are still problems of vibration and noise caused by shaking from side to side at a distance S

[0012] That is, when the roller unit 15 of the prior art is attached and travels, a separation distance S occurs due to the gap between the guide wheel 15-2 of the roller unit 15 and the running rail, not only in the gap space foreign substances, and the tray 10 itself shakes from side to side, causing noise due to vibration. In addition, when inspection is carried out with the help of specific inspection equipment during transfer, a separation process occurs in which the entire tray 10 is lifted to the upper part and then lowered. situation, there are problems such as interference between the roller unit 15 and the running track 16

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