General calibration method for phase retardation error of snapshot-type Mueller matrix ellipsometer

Abstract

The invention belongs to the field of precision optical measurement instrument system parameter calibration, and particularly discloses a general calibration method for a phase retardation error of asnapshot-type Mueller matrix ellipsometer, which comprises the following steps of S1, building the snapshot-type Mueller matrix ellipsometer according to a preset phase retarder thickness ratio, measuring three groups of standard samples to obtain three groups of measurement spectra, S2, performing frequency domain analysis on the three groups of measurement spectra to obtain frequency domain signals, performing channel division processing on the frequency domain signals to obtain multi-order frequency channels, and selecting the frequency channels according to the thickness ratio of the phasedelayer, and S3, carrying out wave number domain analysis calculation on the selected frequency channels to obtain real frequency and imaginary frequency coefficients of the measurement spectrum trigonometric function expansion corresponding to each frequency channel, thereby obtaining a phase delay error of each phase delayer. The phase delay error in the full measurement spectrum of the snapshot-type Mueller matrix ellipsometer can be accurately calibrated, and the method is suitable for different phase delayer thickness ratios.

Description

technical field [0001] The invention belongs to the field of precision optical measuring instrument system parameter calibration, and more specifically relates to a general calibration method for the phase delay error of a snapshot-type Mueller matrix ellipsometer. Background technique [0002] Since the snapshot Mueller matrix ellipsometer was proposed by Matthieu Dubreuil et al. in the article "Snapshot Mueller matrix polarimeter by wavelength polarization coding", the snapshot Mueller matrix ellipsometer has received more and more attention. It has the advantages of short time and no interference from moving devices during the measurement process. A snapshot Mueller matrix ellipsometer usually consists of a light source, a polarizer, four phase retarders with a certain thickness ratio and azimuth angle, an analyzer, and a detector, such as figure 2 As shown in , the core device is four phase retarders, which realize the modulation of the Mueller matrix of the sample to b...

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Problems solved by technology

Matthieu Dubreuil et al. gave an approximate calibration method in the article "Systematic errors specific to snapshot Mueller matrix polarimeter", which approximates the phase delay error of the full measurement band to the error at the central wave number, and the phase delay error obtained by calibration As a fixed value that does not change with the wave number, there is still a large error in the calibration result, and it is not consistent with the actual situation; Hu Dai et al. proposed a method for the thickness ratio of 1:1:5 in the article "Theoretical research of retarder phase deviation channeled Mueller matrix spectropolarimeters". :5 calibration method, the calibration effect of this method is better, but this method has a certain delay due to the use of a low-pass filter, and it is difficult to apply to the calibration of the phase delay in other thickness ratio configurations

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