Micro-nano optical element surface defect detection method and image segmentation method
A technology of image segmentation and optical components, which is applied in the field of image segmentation and segmentation of defective areas of adhesion, can solve problems such as reduced production efficiency, inconsistent accuracy, and increased costs, and achieve the effect of improving accuracy
Pending Publication Date: 2021-02-26
JIAXING UPHOTON OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
The accuracy of subsequent product defect detection results has a great impact on the overall efficiency of manufacturing and processing
On the one hand, defect detection should be used to prevent unqualified products that exceed the defect control standards from entering the market; on the other hand, it is also necessary to prevent qualified products that are still within the defect control standards from being misjudged as unqualified products, resulting in reduced production efficiency. Unreasonably rising costs
The existing surface defect detection technology of micro-nano optical components is usually carried out by human eyes, which is not only inefficient, but also inconsistent in accuracy, and needs to be further improved
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[0036] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. For ease of description, only parts related to the invention are shown in the drawings.
[0037] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.
[0038] The inventors of the present invention have found that when detecting surface defects of micro-nano optical components, for example, when detecting by AOI (Automated Optical Inspection) technology, some defect regions will be adhered by adjacent regions in the shape of a "bee waist" stand up. In some cases, the defect size calculated based on the adhesion area will exceed the control standard for surface defects of micro-nano opti...
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The invention discloses a micro-nano optical element surface defect detection method and an image segmentation method for segmenting an adhered defect area in detection. The method comprises the stepsof acquiring a surface defect distribution diagram of the micro-nano optical element; carrying out distance transformation on a defect area in the surface defect distribution diagram to obtain a grayscale image; performing gray stretching to obtain a stretched image; performing image segmentation by using a watershed algorithm, wherein a plurality of segmented areas obtained by segmentation forma segmented graph; and segmenting a single defect area in the more than two segmented areas to obtain a corrected defect area. According to the embodiment of the invention, the defect area on the surface of the micro-nano optical element is analyzed again on the basis of distance transformation, gray stretching and the watershed algorithm, and the adhered defect area taking the waist-shaped connecting area as the characteristic is corrected, so that the surface defect detection accuracy of the micro-nano optical element is improved.
Description
technical field [0001] The present invention generally relates to micro-nano optical element detection technology, and in particular to a surface defect detection method for micro-nano optical elements and an image segmentation method for segmenting adherent defect regions during the surface defect detection process of micro-nano optical elements. Background technique [0002] Micro-nano optics is an important development direction of the optoelectronics industry at present, and has played a huge role in many fields such as optical communication, optical interconnection, optical storage, and semiconductor devices. Micro-nano optical components, generally speaking, refer to micro-nano-level components that introduce micro-nano optical structures into materials by means of photolithography, electrodeposition, or micro-nano imprinting to achieve new optical functions. Micro-nano optical elements include, for example, DOE (Diffractive Element), MLA (Micro Lens Array), and metasu...
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IPC IPC(8): G06T7/00G06T7/11G06T7/155G06T5/00
CPCG06T7/0002G06T7/11G06T7/155G06T2207/20152G06T2207/30164G06T5/70
Inventor 张东亮
Owner JIAXING UPHOTON OPTOELECTRONICS TECH CO LTD