Light beam pointing control system based on conical mirror and deviation correction method thereof

Abstract

The invention relates to a light beam pointing control system based on a conical mirror and a deviation correction method thereof. The invention aims at solving the technical problems that an existinglight beam pointing control system is complex in structure, detector installation position deviation and interference of dust in air have large influences on detection precision, and provides a lightbeam pointing control system based on a conical mirror and a deviation correction method of the light beam pointing control system. According to the light beam pointing control system based on the conical mirror and the deviation correction method thereof, the light beam forms the Bessel light beam after passing through the conical mirror, the angle offset and the position deviation of the laserbeam can be measured respectively, and meanwhile, due to the characteristics of no diffraction and long focal depth of the Bessel light beam, the focal depth of the central focus is far longer than that of a common convex lens, so that the requirement of the system on the precision of the mounting position of the detector relative to the conical mirror is reduced, the interference of dust particles in air on the detector is smaller, the detection result is more stable, the structure is simple and the size is small.

Description

technical field [0001] The invention relates to a beam pointing control system and a deviation correction method thereof, in particular to a beam pointing control system based on an axicon and a deviation correction method thereof. Background technique [0002] Due to the non-contact nature of laser processing and the non-selectivity of materials, it can complete the manufacture of precision mechanical and optical components that cannot be completed by ordinary mechanical processing, and gradually covers more and more micro-nano pattern processing fields. Among them, femtosecond laser processing has the advantages of no recasting layer, no microcracks, and no recrystallization in the processing structure, which greatly reduces the mechanical stress and surface damage of the manufactured devices. However, in the actual femtosecond laser micro-nano pattern processing process, the beam pointing drift inevitably exists in the processing system, which greatly hinders the ability ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the technical problems that the existing beam pointing control system has a complex structure, and the deviation of the detector installation position and the interference of dust in the air have a great influence on the detection accuracy, and provides a beam pointing control system based on an axicon and its Bias Correction Method

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