Light beam pointing control system based on conical mirror and deviation correction method thereof

A beam pointing and control system technology, applied in optics, optical components, instruments, etc., can solve problems such as the influence of detection accuracy, deviation of detector installation position, complex structure of beam pointing control system, etc., to achieve stable detection results and lower accuracy requirements , the effect of reducing the resolution requirement

Active Publication Date: 2021-03-02
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The purpose of the present invention is to solve the technical problems that the existing beam pointing control system has a complex structure, and the deviation of the detector installati

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  • Light beam pointing control system based on conical mirror and deviation correction method thereof
  • Light beam pointing control system based on conical mirror and deviation correction method thereof
  • Light beam pointing control system based on conical mirror and deviation correction method thereof

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[0036]The present invention will be further described below with reference to the drawings and embodiments.

[0037]A beam pointing control system based on a conical mirror. First, two fast deflection mirrors are set in the laser light path to fine-tune the angle and position offset of the laser beam. After the fast deflection mirror, a beam splitter 3 is used to split a beam of light. Used as a sampling laser beam, used to judge the deviation of the laser beam. After the sampling laser beam split by the beam splitter 3 passes through the cone lens 4, it is formed into a Bessel beam. A high-resolution detector 5 is set within the focal depth range of the Bessel beam to detect the position and position of the beam. Energy distribution.

[0038]The principle of Bessel beam generation is as followsfigure 2 As shown, the light beam is divided into two beams after passing through the conical lens 4. At the same time, the two beams have a certain angle and interfere with each other, and finally...

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Abstract

The invention relates to a light beam pointing control system based on a conical mirror and a deviation correction method thereof. The invention aims at solving the technical problems that an existinglight beam pointing control system is complex in structure, detector installation position deviation and interference of dust in air have large influences on detection precision, and provides a lightbeam pointing control system based on a conical mirror and a deviation correction method of the light beam pointing control system. According to the light beam pointing control system based on the conical mirror and the deviation correction method thereof, the light beam forms the Bessel light beam after passing through the conical mirror, the angle offset and the position deviation of the laserbeam can be measured respectively, and meanwhile, due to the characteristics of no diffraction and long focal depth of the Bessel light beam, the focal depth of the central focus is far longer than that of a common convex lens, so that the requirement of the system on the precision of the mounting position of the detector relative to the conical mirror is reduced, the interference of dust particles in air on the detector is smaller, the detection result is more stable, the structure is simple and the size is small.

Description

technical field [0001] The invention relates to a beam pointing control system and a deviation correction method thereof, in particular to a beam pointing control system based on an axicon and a deviation correction method thereof. Background technique [0002] Due to the non-contact nature of laser processing and the non-selectivity of materials, it can complete the manufacture of precision mechanical and optical components that cannot be completed by ordinary mechanical processing, and gradually covers more and more micro-nano pattern processing fields. Among them, femtosecond laser processing has the advantages of no recasting layer, no microcracks, and no recrystallization in the processing structure, which greatly reduces the mechanical stress and surface damage of the manufactured devices. However, in the actual femtosecond laser micro-nano pattern processing process, the beam pointing drift inevitably exists in the processing system, which greatly hinders the ability ...

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Application Information

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IPC IPC(8): G02B27/00G02B27/09G02B27/10G02B26/08
CPCG02B27/00G02B27/0938G02B27/108G02B26/0816
Inventor 李明张天
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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