MEMS microphone chip
A microphone and chip technology, applied in the field of acoustics and electricity, can solve problems such as diaphragm fracture, MEMS microphone chip failure, and slow expansion, and achieve the effects of reducing adhesion, reducing contact area, and reducing pressure film damping
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[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0017] It should be noted that all directional indications (such as above, lower, left, right, front, rear, internal, external, top, bottom, bottom ...) are only used to interpret a particular attitude (eg. The relative positional relationship between the components, the like, and if the particular attitude is changed, the directional indication is also changed accordingly.
[0018] See figure 2 The present invention provides a MEMS microphone chip 100 that includes a substrate 10 having a back chamber 12 and a diaphragm 20 disposed on the surface of the substrate 10, a back plate 30.
[0019] The substrate 10 includes a ring base 11 that is formed into the back cavity 12, the diaphragm film 20 and the back plate 30 fixed to the annular base 11, the diaphragm 20 is disposed at the substrate 10 and the back Between the plates 30, the diaphragm 20 is formed bet...
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