Mark for monitoring opening precision of shading sheet of photoetching machine and using method of mark

Abstract

The invention provides a mark for monitoring the opening precision of a shading sheet of a photoetching machine and a use method of the mark. The mark comprises a photomask provided with a graphic area and a shading belt surrounding the periphery of the graphic area, labels arranged on inner and outer edges of the shading belt, and an anti-dazzling screen on the photoetching machine, wherein the anti-dazzling screen binds the graphic area and is used for controlling the size of the light-transmitting opening of the photomask, the distance between the outer edge of the shading belt and the graphic area is the precision specification L of the photoetching machine table, the precision rule L is greater than or equal to M and less than or equal to N, the distance between the lable on the inner edge of the shading belt and the graphic area is M/2, and the distance between the label on the outer edge of the shading belt and the graphic area is N+100 microns. By adding the overlay precision labels on the shading belt, online real-time monitoring can be realized, and manpower and machine time are saved; product light leakage or excessive shading caused by the fact that the opening of the anti-dazzling screen is too large or too small is effectively prevented; and through system measurement and grabbing, automatic processing is realized.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a mark and a method for on-line monitoring the opening precision of a shading plate of a lithography machine. Background technique [0002] The Nikon lithography machine determines the light-transmitting area of ​​the pattern on the reticle by controlling the opening size of the Reticle Blind (ARB). [0003] Under normal circumstances, the opening of the ARB is monitored through accuracy, but this method requires an offline machine to operate, and then to watch it with the naked eye on the appearance machine, which is time-consuming and laborious. Second, the accuracy monitoring is placed on the The annual maintenance items will have a delay effect. Once the ARB has a problem, it cannot be caught immediately, resulting in the product being scrapped. [0004] Another method is that the FAB of the factory is currently used more, that is, the manual appearance machine is art...

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a mark and method for online monitoring of the opening accuracy of the shading sheet of the lithography machine, which is used to solve the problem of excessive shading of the shading sheet of the lithography machine in the prior art. or light leakage, resulting in the problem that the dicing line or WAT test point is affected

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