Electronic gas preparation system and method based on chip and intelligent manufacturing

Abstract

The invention relates to the technical field of key electronic gas raw materials and intelligent preparation, in particular to an electronic gas preparation system and method based on a chip and intelligent manufacturing. The system comprises a bottom plate and a supporting frame, and further comprises a first treatment mechanism, a second treatment mechanism, quantitative discharging mechanisms, feeding mechanisms, a cooling mechanism, a liquid nitrogen recovery mechanism, a molecular sieve treatment mechanism, a deep purification mechanism and an electronic gas storage tank, and supporting frames are fixedly mounted at one end of the top of the bottom plate; the first treatment mechanismand the second treatment mechanism are arranged at the top end and the lower end of the interior of the supporting frames respectively, the quantitative discharging mechanisms are arranged at the position, located at the top of the first treatment mechanism, inside the supporting frames and connected with the first treatment mechanism, and the feeding mechanisms are arranged at the positions, located on the side edges of the two supporting frames, of the top of the bottom plate respectively; and the two feeding mechanisms are connected with the two quantitative discharging mechanisms respectively. The system is high in utilization rate, low in cost consumption and high in electronic gas preparation efficiency.

Description

technical field [0001] The invention relates to the technical field of key electronic gas raw materials and intelligent preparation, specifically an electronic gas preparation system and method based on chips and intelligent manufacturing. Background technique [0002] Electronic gas is used in the chip manufacturing process. Electronic gas is an indispensable raw material for the production of electronic industries such as VLSI, flat-panel display devices, compound semiconductor devices, solar cells, and optical fibers. They are widely used in thin films, etching, and doping. Silane is a very important high-purity silicon source gas in the microelectronics industry. Its unique molecular structure and physical and chemical properties make it play an important role in the modern microelectronics industry and material science and technology. role. [0003] The materials in the preparation process of existing electronic gases (such as silane gas) generally require complex chem...

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Problems solved by technology

[0003] The materials in the preparation process of existing electronic gases (such as silane gas) generally require complex chemical reactions to be prepared. During the preparation process, multiple processes are required to operate separately. Impurities affect the purity of electronic gas, and the high cost of equipment is caused by numerous processes. Therefore, we propose an electronic gas preparation system and method based on chips and intelligent manufacturing.

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