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Preparation method of flexible transparent field emission cold cathode

A field emission and cold cathode technology, which is applied in the preparation of flexible transparent field emission spindt cathodes and the field of preparation of flexible transparent field emission cold cathodes, and can solve the problems that field emission cold cathodes are difficult to manufacture in large areas.

Active Publication Date: 2021-04-23
HANGZHOU DIANZI UNIV
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Problems solved by technology

[0006] The purpose of the present invention is to provide a method for the preparation of a flexible transparent field emission spindt cold cathode that is simple, low in cost, and can be prepared in a large area, so as to solve the problems that the current field emission cold cathode is difficult to manufacture in a large area.

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  • Preparation method of flexible transparent field emission cold cathode
  • Preparation method of flexible transparent field emission cold cathode
  • Preparation method of flexible transparent field emission cold cathode

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preparation example Construction

[0026] The invention provides a method for preparing a flexible transparent field emission cold cathode, the preparation steps are as follows figure 1 As shown, it includes depositing a conductive transparent gold film on a flexible transparent substrate; attaching an AAO template on the substrate on which the gold film is deposited; using vacuum physical deposition technology to prepare a spindt-type metal array; removing the AAO template.

[0027] In the specific implementation, the high-temperature-resistant transparent flexible material used is mica sheet, which has good flexibility and light transmittance; the metal of the deposited conductive layer is Au, and according to the data, Au has high conductivity within a certain thickness range and good light transmission.

[0028] Further, in the specific implementation, use a dropper to draw a proper amount of ethanol, drop it on the substrate coated with a conductive layer, and attach the AAO template to the substrate befor...

Embodiment 1

[0035] The high-temperature-resistant transparent flexible substrate uses a mica sheet with a side length of 1cm and a thickness of 0.1mm. The mica sheet is ultrasonically cleaned with absolute ethanol for 15 minutes, taken out and dried, and fixed on the PLD sample stage, and the gold target is placed in the target groove. First, turn on the mechanical pump, feed Ar gas, turn on the gate valve and molecular pump, and vacuum the device until the pressure drops below 10^-4KPa; turn on the laser, set the mode, adjust the laser position, and start sputtering , the time is 30min. Take out the mica sheet deposited with the Au conductive layer, use a dropper to absorb an appropriate amount of ethanol, drop it on the center part, and attach the AAO template to the substrate with tweezers before the ethanol is completely volatilized. Wait until it is completely dry, then fix the above substrate on the sample stage, put it into the vacuum coating chamber of the electron beam evaporatio...

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Abstract

The invention belongs to the field of field emission cold cathodes, and provides a preparation method of a flexible transparent field emission cold cathode, which is mainly characterized in that the preparation of a field emission cold cathode material on a substrate with good flexibility and light transmission is realized on a high-temperature-resistant transparent flexible substrate based on an ultra-thin porous alumina (AAO) template and a vacuum physical deposition technology. The preparation method mainly comprises four parts: (1) depositing a conductive transparent gold film on a flexible transparent substrate; (2) attaching an AAO template to the substrate on which the gold film is deposited; (3) preparing a spardt type metal array by using a vacuum physical deposition technology; and (4) removing the AAO template. The preparation method of the flexible transparent field emission cold cathode is simple and low in cost, large-area preparation can be carried out, and the flexible transparent field emission cold cathode has a wide application prospect in the fields of flexible flat-panel displays and the like.

Description

technical field [0001] The invention belongs to the technical field of electronic material preparation, and in particular relates to a preparation method of a flexible transparent field emission cold cathode, in particular to a preparation method of a flexible transparent field emission spindt cathode. Background technique [0002] The principle of field emission is that the height of the surface barrier of the material is reduced and the width is narrowed by an external electric field, and electrons pass through the surface barrier due to the tunnel effect to form electron emission. Field emission cold cathodes can be divided into: metal cone array type represented by spindt type cathode, new material type represented by carbon nanotubes, and transition metal oxides, etc., and its structure mainly includes: emitter cone, insulating layer, conductive layer, gate. Today, field emission cold cathodes have been widely used in various aspects, such as field emission display scr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/02H01J1/304
CPCH01J1/3042H01J9/025
Inventor 郑辉周珂张阳郑梁郑鹏
Owner HANGZHOU DIANZI UNIV
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