Coating experiment vacuum system and working method thereof
A technology of vacuum system and vacuum system, which is applied in the field of vacuum, and can solve the problems of high cost, complex vacuum system of experimental line, poor reliability, etc.
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[0041] Further, as a preferred embodiment, it also includes several third butterfly valves, all of which are arranged on the vacuum pipeline 16, wherein the several third butterfly valves include butterfly valve F39, butterfly valve G40, butterfly valve H41 and butterfly valve I42, wherein The butterfly valve F39 is located between the first exhaust point 17 and the fourth exhaust point 30, the butterfly valve G40 is located between the fourth exhaust point 30 and the fifth exhaust point 31, and the butterfly valve H41 is located between the sixth exhaust point 32 and the fifth exhaust point. Between the seven exhaust points 33 , the butterfly valve I42 is located between the seventh exhaust point 33 and the second exhaust point 18 .
[0042] Further, as a preferred embodiment, several second vacuum gauges are also included, wherein the first pipeline 13 , the second pipeline 14 , the third pipeline 15 and the vacuum pipeline 16 are all provided with second vacuum gauges. Seve...
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