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Coating experiment vacuum system and working method thereof

A technology of vacuum system and vacuum system, which is applied in the field of vacuum, and can solve the problems of high cost, complex vacuum system of experimental line, poor reliability, etc.

Inactive Publication Date: 2021-04-27
CHINA TRIUMPH INT ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The vacuum system of the existing experimental line is complicated, the reliability is poor, and the cost is high, which is not conducive to the development of Low-E glass products

Method used

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  • Coating experiment vacuum system and working method thereof

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Embodiment approach

[0041] Further, as a preferred embodiment, it also includes several third butterfly valves, all of which are arranged on the vacuum pipeline 16, wherein the several third butterfly valves include butterfly valve F39, butterfly valve G40, butterfly valve H41 and butterfly valve I42, wherein The butterfly valve F39 is located between the first exhaust point 17 and the fourth exhaust point 30, the butterfly valve G40 is located between the fourth exhaust point 30 and the fifth exhaust point 31, and the butterfly valve H41 is located between the sixth exhaust point 32 and the fifth exhaust point. Between the seven exhaust points 33 , the butterfly valve I42 is located between the seventh exhaust point 33 and the second exhaust point 18 .

[0042] Further, as a preferred embodiment, several second vacuum gauges are also included, wherein the first pipeline 13 , the second pipeline 14 , the third pipeline 15 and the vacuum pipeline 16 are all provided with second vacuum gauges. Seve...

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Abstract

The invention discloses a coating experiment vacuum system, and relates to the technical field of vacuum pumping. The system comprises a sheet feeding lock chamber vacuum system, a coating section vacuum system, a sheet discharging lock chamber vacuum system, a vacuumizing system, a first gate valve, a second gate valve, a third gate valve and a fourth gate valve, wherein the vacuumizing system is connected with the sheet feeding lock chamber vacuum system, the coating section vacuum system and the sheet discharging lock chamber vacuum system, the first gate valve is arranged at one end of the sheet feeding lock chamber vacuum system, the second gate valve is arranged between the sheet feeding lock chamber vacuum system and the coating section vacuum system, the fourth gate valve is arranged at one end of the sheet discharging lock chamber vacuum system, and the third gate valve is arranged between the coating section vacuum system and the sheet discharging lock chamber vacuum system. The coating experiment vacuum system is simple in structure, high in reliability, low in cost and beneficial to research and development of Low-E glass products, continuous production of Low-E glass can be achieved, the production rhythm can be improved, and the production efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of vacuuming, in particular to a coating experiment vacuum system and a working method thereof. Background technique [0002] With the enhancement of environmental awareness, the country has promoted the improvement of building energy conservation requirements. In recent years, Low-E glass (low-emissivity glass) has been used more and more widely, and the development of the market has also put forward new requirements for the diversity of Low-E glass products. Low-E glass manufacturers pay more and more attention to the development of new film systems. Experimental development on a large line not only affects normal production, but is also very uneconomical. Therefore, the development of an experimental line has become the first choice for major manufacturers in the industry. [0003] The vacuum system of the existing experimental line is complicated, the reliability is poor, and the cost is high, which i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/00C23C14/56
CPCC03C17/002C23C14/566C03C2218/15
Inventor 王贝
Owner CHINA TRIUMPH INT ENG