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Anisotropic graphite and anisotropic graphite composite

An anisotropic, graphite technology, applied in the direction of graphite, electric solid devices, semiconductor devices, etc., can solve the problem of low thermal conductivity, and achieve the effect of superior thermal conductivity and superior long-term reliability

Pending Publication Date: 2021-05-07
KANEKA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] Anisotropic graphite has the property of high thermal conductivity in the direction parallel to the crystal orientation plane of graphite, but low thermal conductivity in the direction perpendicular to the crystal orientation plane of graphite

Method used

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  • Anisotropic graphite and anisotropic graphite composite
  • Anisotropic graphite and anisotropic graphite composite
  • Anisotropic graphite and anisotropic graphite composite

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0078] Laminate 2000 sheets of polyimide film (size 50mm×50mm, thickness 25μm), and then, at 40kg / cm 2 While pressurizing to a certain pressure, a graphite block (size 45 mm×45 mm, thickness 23 mm) was produced by heat-treating to 2900° C. in an inert gas atmosphere.

[0079] The thermal conductivity in the direction parallel to the crystal orientation plane was 1500 W / mK, and the thermal conductivity in the direction perpendicular to the crystal orientation plane was 5 W / mK.

[0080] Place the obtained graphite block (size 45mm x 45mm, thickness 23mm) in such a way that the crystallographic orientation plane of the graphite layer is parallel to the X-Z plane, and then cut it with a wire saw to obtain sides parallel to the X axis ( Anisotropic graphite whose length of side a) is 20 mm, the length of the side (side b) parallel to the Y axis is 20 mm, and the length of the side (side c) parallel to the Z axis is 5 mm. will diameter The diamond tool is pressed on the top and b...

Embodiment 2

[0084] The number of holes formed is 6000 / mm 2 , except that, an anisotropic graphite composite was produced in the same manner as in Example 1. Table 1 shows the thermal conductivity characteristics and long-term reliability evaluation results of the obtained anisotropic graphite composite.

Embodiment 3

[0086] The number of holes formed is 3500 / mm 2 , except that, an anisotropic graphite composite was produced in the same manner as in Example 1. Table 1 shows the thermal conductivity characteristics and long-term reliability evaluation results of the obtained anisotropic graphite composite.

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Abstract

Provided is an anisotropic graphite for producing an anisotropic graphite composite that has excellent thermal conductivity characteristics and long-term reliability as a heat diffusing member. The anisotropic graphite has a crystal orientation plane that is parallel to an X-Z plane given an X-axis, a Y-axis perpendicular to the X-axis, and a Z-axis that is perpendicular to the plane defined by the X-axis and the Y-axis, and a specific number of pores having a specific size are formed on at least one plane among the planes parallel to the X-Y plane of the anisotropic graphite.

Description

technical field [0001] The present invention relates to anisotropic graphite and anisotropic graphite composite. Background technique [0002] Anisotropic graphite has high thermal conductivity in a direction parallel to the crystal orientation plane of graphite, but has a low thermal conductivity in a direction perpendicular to the crystal orientation plane of graphite. As anisotropic graphite, for example, a laminate of graphite is known. [0003] Due to its superior thermal conductivity, anisotropic graphite is used as a heat dissipation material. In semiconductor packages, anisotropic graphite efficiently transfers heat from semiconductor elements to coolers, thereby making the heat generated by the semiconductor elements located on the upper part of the semiconductor package The heat is not concentrated. [0004] For example, an anisotropic graphite composite in which anisotropic graphite is bonded to an inorganic material layer is known. Among them, there is a metho...

Claims

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Application Information

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IPC IPC(8): H01L23/373H01L23/36H05K7/20
CPCH05K7/20H01L23/373C09K5/14H01L23/3735H01L23/3733H01L23/3736H01L23/3737B32B3/266B32B9/007B32B2457/00B32B2307/706B32B15/20B32B2307/732B32B2307/708B32B3/30B32B9/041B32B15/043B32B2307/302C01B32/21B32B7/12B32B2457/14C01P2006/32Y10T428/30
Inventor 沓水真琴
Owner KANEKA CORP
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