Method for processing elastic diaphragm of sputtering film pressure sensor

Abstract

The invention discloses a method for processing an elastic diaphragm of a sputtering film pressure sensor. The method comprises the following steps: (1) an amorphous alloy material is cast and formed to obtain the elastic diaphragm; (2) the elastic membrane comprises a flat-plate-shaped pressed part and a cylindrical supporting part, and the thickness of the pressed part of the elastic membrane comprises a reserved machining thickness; (3) the pressed part of the elastic membrane is processed to a specified thickness according to specific use requirements; and (4) the processed pressed part of the elastic membrane is precisely ground, and then precise polishing is carried out after the precise grinding is finished. According to the method for processing the elastic diaphragm of the sputtering film pressure sensor, the external top end is cut to form the pressed part, the elastic diaphragm can be manufactured to be thinner, the measuring range can be further expanded in the micro-pressure direction, the working efficiency is greatly improved, the performance is improved, the residual stress is small, the measuring precision of the sensor is improved, and the service life of the elastic diaphragm is prolonged.

Description

technical field [0001] The invention relates to the technical field of pressure sensor processing, in particular to a processing method for an elastic diaphragm of a sputtering thin film pressure sensor. Background technique [0002] The current processing technology of the elastic diaphragm of the pressure sensor is formed by cutting a whole piece of steel rod. Specifically, one end of the steel rod is hollowed out, and then it is cut and processed inside the cavity to form a diaphragm at the other end. This processing method cuts The workload is heavy, and the residual stress of the diaphragm is large. When the diaphragm part of the sensitive element is processed for a small-range sensor, because the diaphragm is required to be very thin, the processing difficulty increases sharply, and the flatness and smoothness are limited. The thinner the more difficult to process, making The range cannot be further developed in the direction of micro pressure. Contents of the invent...

AI Technical Summary

Problems solved by technology

[0002] The current processing technology of the elastic diaphragm of the pressure sensor is formed by cutting a whole piece of steel rod. Specifically, one end of the steel rod is hollowed out, and then it is cut and processed inside the cavity to form a diaphragm at the other end. This processing method cuts The workload is heavy, and the residual stress of the diaphragm is large. When the diaphragm part of the sensitive element is processed for a small-range sensor, because the diaphragm is required to be very thin, the processing difficulty increases sharply, and the flatness and smoothness are limited. The thinner the more difficult to process, making The range cannot be further developed in the direction of micro pressure