Diffractive optical element and system for generating focused flat-topped spot light beam

Abstract

An embodiment of the invention discloses a diffractive optical element and a system for generating a focused flat-topped light spot beam. The diffractive optical element is used for generating the focused flat-topped light spot through diffraction and focusing of a focusing mirror when Gaussian light is incident, and comprises a Gaussian light receiving module and a phase modulation module, wherein the Gaussian light receiving module is used for receiving the Gaussian light; the phase modulation module is used for carrying out binarization phase modulation of sinc function beam splitting on the Gaussian light, the modulation phase of a modulation area of the phase modulation module is pi, and the modulation phase of a non-modulation area of the phase modulation module is 0; and the modulation area comprises a rectangle with the side length a and b and a square with the side length b, a is equal to 2w, b is equal to w, and w is the size of an incident light spot. The novel diffractive optical element is adopted for shaping, the size of the flat-topped focusing light spot is more accurately controlled, Gaussian beam incidence generates different phase differences through phase modulation of the diffractive optical element, and therefore an ideal flat-topped beam is obtained in a focusing plane.

Description

technical field [0001] The embodiments of the present invention relate to the technical field of optical equipment, and in particular to a diffractive optical element and a system for generating a focused top-hat spot beam. Background technique [0002] At present, in the laser micromachining industry, especially in applications such as laser lift-off, laser annealing, and laser solar panel scribing, traditional laser processing only relies on the Gaussian focused spot obtained by the focusing system, with high intermediate energy and edge energy. Low, in the process of processing, it often occurs that the middle area is overheated and over-processed, while the edge area is under-processed. Therefore, the focus flat-top spot distribution has increasingly become a processing bottleneck in related industries. [0003] At present, the main methods for converting Gaussian focus spot into flat-top focus spot include: aspheric lens, microlens array, aperture method, etc. However...

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Problems solved by technology

[0004] The purpose of the embodiments of the present invention is to provide a diffractive optical element and a system for generating a focused flat-top spot beam, so as to solve the problems existing in the existing Gaussian focused spot conversion in terms of energy utilization rate, difficulty in component preparation, and difficulty in adjustment, etc.

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