Multifunctional pickling table device

Abstract

The invention provides a multifunctional pickling table device, which comprises an equipment body and a control device, wherein an operation platform is arranged in the middle of the equipment body, and an acid tank and a water washing tank are arranged on the operation platform; a mechanical arm for controlling a sample to move is arranged above the operation platform; an air exhaust system is arranged on the circumferential side wall of the operation platform; and the control device controls the movement of the mechanical arm and controls the cleaning procedures of the acid tank and the water washing tank. According to the multifunctional pickling table device, the problems of few types of acid tanks of a manual pickling table, single wafer size, incoherent process flow, tedious use process and the like are solved, and the safety and the convenience when the equipment is used are greatly improved.

Description

technical field [0001] The invention relates to the field of semiconductor wet process, in particular to a multifunctional pickling station device. Background technique [0002] In recent years, China's semiconductor industry has developed rapidly, and semiconductor chip design and manufacturing and back-end packaging technology have continued to innovate. Wet etching is an important part of semiconductor design and manufacturing, and its technological innovation requires a lot of experiments. [0003] In actual experimental applications, wet etching must be equipped with corresponding wet equipment, that is, a pickling station, to ensure personnel safety and experimental reliability during production or experimentation. The functions of the pickling station can be divided into two categories: etching function and cleaning function. The etching function is responsible for using different chemical solutions to react to achieve pattern transfer. The cleaning function is mainl...

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Problems solved by technology

[0004] Due to the nature of the chemical solution in the traditional experimental pickling station, different pickling tanks are designed to prevent the generation of other products from affecting the experimental results

The traditional experimental pickling station has the following disadvantages: the number of equipment pickling tanks is small, and the function is single; the size of the tank body is fixed, and the changeable amount of the wafer size is small; the machine occupies a large area, which affects the layout of the laboratory; Manual operation is relatively complicated, and it is easy to be stained with liquid medicine, which endangers safety; manual operation, the process time cannot be accurately controlled; dry in and wet out, and other drying equipment must be equipped

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