Chamber structure of tubular PECVD equipment
A technology of equipment and chamber, which is applied in the field of chamber structure of tubular PECVD equipment, can solve problems such as insufficient air flow through graphite boats, achieve improved stability and uniformity, improve stability and uniform performance, and reduce warping The effect of curvature
Pending Publication Date: 2021-05-28
CENT SOUTH UNIV
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Problems solved by technology
[0004] The object of the present invention is to provide a chamber structure of tubular PECVD equipment, to solve the problems in the prior art above, to realize that the process gas can be quickly and evenly distributed in the quartz furnace tube, the uniformity of gas flow distribution in the tube and The uniformity of the deposited film is greatly improved, avoiding the phenomenon that the gas supply pipe is at the upper position of the quartz furnace tube, resulting in insufficient air flow through the graphite boat, so that the air flow between the silicon wafers in the quartz furnace tube is uniform
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[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0027] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] The invention provides a chamber structure of tubular PECVD equipment, comprising a quartz furnace tube 9, a front end flange assembly, a tail end flange assembly and a gas supply device; The end flange com...
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The invention discloses a chamber structure of tubular PECVD equipment. The chamber structure comprises a quartz furnace tube, a front-end flange assembly, a tail-end flange assembly and an air supply device; the two ends of the quartz furnace tube are fixedly connected with the front-end flange assembly and the rear-end flange assembly respectively; a graphite boat is arranged in the quartz furnace tube; the front-end fixing flange sleeves the outer wall of one end of the quartz furnace tube; an front-end air inlet flange is annularly arranged; an annular cavity is formed in the front-end air inlet flange; a plurality of air distribution holes are circumferentially formed in the inner wall of the front-end air inlet flange at equal intervals; the air distribution holes communicate with the annular cavity; the bottom of the outer wall of the front-end air inlet flange communicates with an air inlet pipe; the apertures of the air distribution holes far away from the air inlet pipe are gradually increased; and the other end of the quartz furnace tube communicates with the air supply device. Process gas can be quickly and uniformly distributed in the quartz furnace tube, and the distribution uniformity of gas flow in the tube and the uniformity of a deposited film are greatly improved.
Description
technical field [0001] The invention relates to the technical field of PECVD equipment, in particular to a chamber structure of tubular PECVD equipment. Background technique [0002] Since the 1980s, the photovoltaic industry has developed rapidly, and crystalline silicon solar cells have dominated. In order to make clean solar energy a more commonly used energy source, there have been major efforts in progress in the following three areas: (1) Increase the energy conversion efficiency of solar cells, (2) improve long-term stability (minimize degradation), and (3) reduce manufacturing costs. In order to further improve the power conversion efficiency of solar cells produced on an industrial scale and reduce production costs, a large number of different manufacturing techniques and cell structures have emerged internationally. In order to make better use of solar energy, it is necessary to develop solar cells with higher conversion efficiency. Crystalline silicon solar cell...
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Login to View More IPC IPC(8): C23C16/50C23C16/455
CPCC23C16/45559C23C16/45565C23C16/45568C23C16/50
Inventor 周继承黄静廖佳梁慧玲徐伟吕博文
Owner CENT SOUTH UNIV