Micro-airflow sensor and system

Abstract

The invention relates to a micro-airflow sensor and system, in particular to the field of gas flow rate detection. The invention provides the micro-airflow sensor. The micro-airflow sensor comprises a substrate, a grid electrode, a source electrode, a drain electrode, a container, a first graphene layer, a second graphene layer, a breather pipe and a connecting part, when tiny gas passes through the breather pipe, the tiny gas acts on the second graphene layer in the container through the gas outlet part of the breather pipe, so that the second graphene layer moves, the second graphene layer deforms, the curvature of the second graphene layer is changed, so that the carrier density on the second graphene layer is changed, an input current is introduced into the micro-airflow sensor, and the carrier density on the second graphene layer is changed, so that an output electric signal of the micro-airflow sensor is correspondingly changed; and according to the corresponding relationship between the output electric signal and the to-be-measured micro-airflow velocity, the to-be-measured micro-airflow velocity is obtained.

Description

technical field [0001] The present application relates to the field of gas flow rate detection, in particular to a micro-flow sensor and system. Background technique [0002] As we all know, weak airflow detection is a major difficulty in the field of modern production control. In the currently known domestic production inspection field, weak gas pressure detection is a relatively weak field. [0003] In the prior art, a chemical plant usually detects gas flow through a gas flow meter. Gas flow meters usually require secondary control extensions before they can be used. [0004] However, the structure of the gas flowmeter is complex, the cost is high, and experienced professional technicians are required for use and maintenance, and the noise signal caused by the surrounding environment and operation actions of the gas flowmeter in the prior art is also very high, which will affect the flow rate of the gas. The measurement of the micrometer often affects the normal test r...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a micro-flow sensor and system to solve the problem of complex structure and high cost of gas flowmeters in the prior art, and the need for experienced professional technicians for use and maintenance. , and the noise signal caused by the surrounding environment and operating actions of the gas flowmeter in the prior art is also very high, which will often affect the normal test results of the gas flowmeter to form errors, and then affect the detection of the micro-flow.

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