Multi-degree-of-freedom high-precision motion platform based on few-branch-chain mechanism

Abstract

The invention discloses a multi-degree-of-freedom high-precision motion platform based on a few-branch-chain mechanism. The multi-degree-of-freedom high-precision motion platform comprises a static platform, four telescopic motion branch chains, a movable platform and four same piezoelectric inertial drivers. The static platform and the movable platform are connected through a flexible ball pair and a flexible hooke joint, and the motion branch chains are actuated by linear inertial piezoelectric actuators with a displacement sensing function. The actuator comprises a proportional linear Hall sensor, an actuating body, a motion unit, a cylindrical shell, a permanent magnet and a base. According to the four-degree-of-freedom platform, the flexible hinges are adopted to replace traditional kinematic pairs, the four-degree-of-freedom platform has the advantages of being easy to achieve equipment miniaturization, improving repeated positioning accuracy, being high in motion sensitivity and the like, meanwhile, the platform can reach a static stable state, and the problems of vibration and collision in the transportation process are solved. Large-stroke feeding motion of the platform is achieved through macro motion, and precise positioning is achieved by means of micro motion. And the platform is endowed with large-stroke and high-precision macro-micro motion capability.

Description

technical field [0001] The invention belongs to a multi-degree-of-freedom parallel motion platform, in particular to a multi-degree-of-freedom high-precision motion platform based on a less-branched chain mechanism. Background technique [0002] As various optical systems move from laboratories to complex application environments, the influence of temperature field, gravity field (anti-gravity field) and residual stress environment on optical systems is becoming more and more significant. Therefore, in the optical system, various adjustment mechanisms are often required to perform multi-degree-of-freedom precise adjustments to the optical elements to compensate for the system aberration caused by the above reasons and improve the imaging quality. At present, most of the optical systems use multi-degree-of-freedom stewart parallel platforms (in the form of six scalable motion branch chains) as adjustment mechanisms. This type of mechanism has a large number of motion branche...

AI Technical Summary

Problems solved by technology

Based on this, the present invention proposes a four-degree-of-freedom high-precision motion mechanism based on macro-micro motion

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