The invention discloses a multi-degree-of-freedom high-precision motion platform based on a few-
branch-chain mechanism. The multi-degree-of-freedom high-precision motion platform comprises a static platform, four telescopic motion
branch chains, a movable platform and four same piezoelectric inertial drivers. The static platform and the movable platform are connected through a flexible ball pair and a flexible hooke joint, and the motion
branch chains are actuated by linear inertial
piezoelectric actuators with a displacement sensing function. The
actuator comprises a proportional linear Hall sensor, an actuating body, a motion unit, a cylindrical shell, a permanent
magnet and a base. According to the four-degree-of-freedom platform, the flexible hinges are adopted to replace traditional kinematic pairs, the four-degree-of-freedom platform has the advantages of being easy to achieve equipment
miniaturization, improving repeated positioning accuracy, being high in motion sensitivity and the like, meanwhile, the platform can reach a static
stable state, and the problems of vibration and collision in the transportation process are solved. Large-
stroke feeding motion of the platform is achieved through
macro motion, and precise positioning is achieved by means of
micro motion. And the platform is endowed with large-
stroke and high-precision
macro-
micro motion capability.