Three-degree-of-freedom high-precision motion mechanism based on macro-micro motion mode

Abstract

The invention discloses a three-degree-of-freedom high-precision motion mechanism based on a macro-micro motion mode. The three-degree-of-freedom high-precision motion mechanism comprises a static platform, three telescopic motion branch chains, a movable platform and three same piezoelectric inertial drivers. The static platform and the movable platform are connected through a flexible ball pair and a flexible hooke joint, and a linear inertia piezoelectric actuator with a displacement sensing function is adopted as the moving branch chain. The actuator comprises a proportional linear Hall sensor, an actuating body, a motion unit, a cylindrical shell, a permanent magnet and a base. According to the three-dimensional platform, the flexible hinges are adopted to replace traditional kinematic pairs, the three-dimensional platform has the advantages of being easy to achieve miniaturization of equipment, improving repeated positioning accuracy, being high in motion sensitivity and the like, meanwhile, the platform reaches a static stable state, and the problems of vibration and collision in the transportation process are solved. Large-stroke feeding motion of the platform is achieved through macro motion, and precise positioning is achieved by means of micro motion. According to the invention, the platform is endowed with large-stroke and high-precision macro-micro motion capability.

Description

technical field [0001] The invention relates to a three-dimensional parallel motion platform, in particular to a three-degree-of-freedom high-precision motion mechanism based on a macro-micro motion mode, which is a three-dimensional parallel motion platform driven by a piezoelectric inertial actuator using a flexible hinge. Background technique [0002] The optical system will be affected by gravity, temperature, air pressure, and vibration during the working process. It is often necessary to adjust the pose of the secondary mirror through a multi-degree-of-freedom motion platform to achieve the adjustment and correction tasks of the secondary mirror of the optical imaging system and realize the optical system. Stable to ensure beam quality. However, studying the current situation at home and abroad, the adjustment mechanism mostly adopts the stewart parallel platform based on six degrees of freedom (in the form of six telescopic struts) as the adjustment mechanism. Howeve...

AI Technical Summary

Problems solved by technology

However, the more the number of struts, the greater the quality of the system. For some optical adjustment requirements that do not require six degrees of freedom movement, its application range is severely limited.

[0003] The number of components in the traditional kinematic pair is large, the weight is large, the assembly time is long, and there are problems such as friction, wear, and lubrication between mechanisms

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