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High-temperature-resistant wide-range surface acoustic wave strain sensor

A technology for strain sensors and surface acoustic wave devices, which is applied in the directions of using ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., can solve the problems of limiting the upper limit of strain of surface acoustic wave devices, and achieve simple production, small size and low cost. Effect

Active Publication Date: 2021-06-18
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, high temperature applications will greatly limit the upper limit of the strain that can be measured by surface acoustic wave devices.

Method used

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  • High-temperature-resistant wide-range surface acoustic wave strain sensor
  • High-temperature-resistant wide-range surface acoustic wave strain sensor
  • High-temperature-resistant wide-range surface acoustic wave strain sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Such as figure 1As shown, the elastomer bracket is in the shape of an arch bridge, that is, in the shape of a few characters, including an upper plate 11, side plates 12 supporting the upper plate on both sides of the upper plate 11, bases 13 on both sides of the side plate, and the surface acoustic wave device 3. 11 on the upper plate.

Embodiment 2

[0044] Such as figure 2 As shown, the arch bridge-shaped elastic body support is an inverted U shape, that is, the bases 13 on both sides of the bottom are reduced on the basis of a few characters. When the length of the base is 0, it changes from embodiment 1 to embodiment 2.

[0045] The elastic body support of embodiment 1 and 2 is the arch bridge shape elastic body support, below with figure 1 The azimuth-shaped elastic body bracket is taken as an example to illustrate the conditions that the arch-bridge-shaped elastic body brackets in Embodiment 1 and Embodiment 2 need to meet.

[0046] Such as image 3 As shown, the height of the entire arch bridge-shaped elastic body support is h1, the thickness of the upper plate is h3, the thickness of the bottom base is h2, the length is l1, the thickness of the side plates is l3, and the distance between the two side plates is l2 . The specific conditions that need to be met are as follows:

[0047] (1) The thickness h3 of the...

Embodiment 3

[0061] Such as Figure 6 As shown, the elastomer support is two parallel support rods, the width of the parallel support rods is L1, the height is H1, the length is A1, the distance between the two parallel support rods is L2, and the length of the surface acoustic wave device is B1 and the width is L3, the following conditions must be met (such as Figure 7 shown):

[0062] (1) L2+2L1B1;

[0063] (2) The Poisson's ratio of the parallel support rods is greater than 0.25, and the Young's modulus is less than 300Gpa.

[0064] Preferably, L2=(0.1˜0.8)*L3, A1=(1˜3)*B1. The material of the elastomeric stent is a high-temperature soft alloy, and the main component is silver.

[0065] Similarly, the high-temperature ceramic glue bonds the surface acoustic wave device to the elastomer support through the alumina layer on the back of the piezoelectric substrate. The sensor needs to be placed in a vacuum chamber to reduce the bubbles in the high-temperature ceramic glue and ensure t...

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Abstract

The invention discloses a high-temperature-resistant wide-range surface acoustic wave strain sensor, which comprises an elastic body bracket and a surface acoustic wave device arranged on the arched elastic body bracket, and the elastic body bracket and the surface acoustic wave device are bonded through high-temperature ceramic glue; the surface acoustic wave device comprises a piezoelectric substrate layer, an interdigital electrode and a reflecting grating; and the strain sensor is attached to the surface of an object to be measured through the elastic body bracket. The elastic body bracket transmits the strain of an object to be measured to the surface acoustic wave device, so that the strain sensor is subjected to uniform strain, and the frequency change of the surface acoustic wave device and the measured strain are kept in a linear transmission proportion. The strain range of the surface acoustic wave sensor can reach 9-10 times that of a surface acoustic wave sensor made of the same material and with the same thickness, and additional complex processes are not needed; and the sensor can be applied to more tiny, complex, closed and high-temperature environments.

Description

technical field [0001] The invention relates to the application field of acoustic wave sensors, in particular to a surface acoustic wave strain sensor with high temperature resistance and wide range. Background technique [0002] In the high-precision manufacturing process of machinery, high-speed moving parts are often the core parts, such as rollers, bearings, blades, rotating shafts, etc., and in-situ and online sensing of the strain of moving parts is required. Such sensors are widely used in mechanical systems Structural design, health monitoring, on-site real-time control of manufacturing accuracy, intelligent fault diagnosis and other important fields. A good strain sensor can better control the precise manufacturing process, which can help break through the bottleneck of manufacturing accuracy. Wireless passive surface acoustic wave (Surface Acoustic Wave, SAW) sensor is the most ideal sensing technology to meet the sensing of complex environments such as inconvenie...

Claims

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Application Information

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IPC IPC(8): G01B17/04
CPCG01B17/04
Inventor 董树荣张季恺付从艺轩伟鹏陈金凯金浩骆季奎
Owner ZHEJIANG UNIV