SOI wafer quality detection method and system
A quality inspection method and inspection system technology, applied in the field of SOI wafer quality inspection methods and systems, can solve problems such as inability to non-destructively inspect the quality of SOI wafers, and achieve the effect of non-destructive evaluation
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Embodiment 1
[0037] see Figure 1 to Figure 5 , the present embodiment provides a kind of SOI wafer quality detection method, it is characterized in that, comprises the following steps:
[0038] 1) An SOI wafer is provided, and the SOI wafer includes a substrate layer 101, a buried oxide layer 102, and a semiconductor layer 103 stacked in sequence; the semiconductor layer 103 includes a first doped layer 103a and a second doped layer 103a stacked in sequence. miscellaneous layer 103b;
[0039] 2) placing a first pressure probe 104 and a second pressure probe 105 with a separation distance on the surface of the semiconductor layer 103;
[0040] 3) Ground the first pressure probe 104, apply a constant first voltage to the second pressure probe 105, apply a variable second voltage to the substrate layer 101, and collect the second pressure probe First current data corresponding to different second voltages at 105;
[0041] 4) extracting the test surface mobility according to the different ...
Embodiment 2
[0074] like Image 6 As shown, the present embodiment provides a kind of SOI wafer quality detection system, it is characterized in that, comprises:
[0075]A current and voltage test module 107, which is used to perform a current and voltage test on the SOI wafer; the SOI wafer includes a substrate layer 101, a buried oxide layer 102 and a semiconductor layer 103 stacked in sequence; the semiconductor layer 103 includes sequentially The stacked first doped layer 103a and the second doped layer 103b; the first pressure probe 104 and the second pressure probe 105 with a separation distance are placed on the surface of the semiconductor layer 103; the first pressure probe The needle 104 is grounded, the current and voltage testing module 107 applies a constant first voltage to the second pressure probe 105, and applies a variable second voltage to the substrate layer 101;
[0076] A data collection and judging module 108, which collects the first current data corresponding to d...
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Abstract
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