Gravity compensator and bearing device

A technology of gravity compensation and acting force, applied in the field of magnetic attraction, can solve the problems of limited vibration isolation frequency, high noise, uncompact structure, etc., and achieve the effect of large magnetic action area

Active Publication Date: 2021-06-29
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve this problem, gas-based vibration isolation equipment is currently widely used in active vibration isolation. The existing vibration isolation equipment mainly includes the following two types. The first type uses air pumps and air valves to adjust the gas flow to provide spring stiffness and Gravity compensation has the problems of high noise and limited vibration isolation frequency; the second type, gravity compensator is more and more popular because of its clean, noise-free, vibration-free and maintenance-free features, but the gap between the existing gravity compensators It is a Z-axis structure, which has the problems of uncompact structure, small load and small travel range

Method used

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Experimental program
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Effect test

Embodiment 1

[0046]For some high-precision industrial equipment, active vibration isolation is required to avoid external vibration and disturbance. Existing vibration isolation equipment uses airflow adjustment, which has the problems of high noise and limited vibration isolation efficiency.

[0047] In order to solve this problem, this embodiment provides a gravity compensator, such as figure 1 As shown, the gravity compensator includes a first magnetic assembly 1 and a second magnetic assembly 2, the first magnetic assembly 1 and the second magnetic assembly 2 are not in contact with each other, and among the first magnetic assembly 1 and the second magnetic assembly 2 One is fixed, and the other is movable. The movable assembly is used to carry the load, and a magnetic force can be generated between the first magnetic assembly 1 and the second magnetic assembly 2, and the magnetic force realizes the support of the load. In order to achieve the purpose of gravity compensation.

[0048]...

Embodiment 2

[0072] The structural shape of this embodiment is the same as that of Embodiment 1, and the magnetization direction of the magnet is also the same. The only difference is that the fixed structure and the movable structure are interchangeable. Assembly 2, this embodiment is completely opposite to Embodiment 1. The fixed structure of this embodiment is the second magnetic assembly 2, and the movable structure is the first magnetic assembly 1, that is, the second magnetic assembly 2 is a stator, and the first magnetic assembly 1 is The mover, the second magnetic assembly 2 generates a magnetic force for the first magnetic assembly 1 to drive the first magnetic assembly 1 to move along the Z-axis direction, that is, the second main magnet 221 and the second auxiliary magnet 222 are used to move the first main magnet 221 together. The magnet 121 and the first secondary magnet 122 move upward along the Z axis. Since the top surface of the column 112 in the first magnetic assembly 1 ...

Embodiment 3

[0075] The structure of this embodiment is similar to that of Embodiment 1, and the only difference is that the shapes of the cross sections of the first main magnet 121, the first auxiliary magnet 122, the second main magnet 221 and the second auxiliary magnet 222 are the same as those of each magnet in Embodiment 1. rhombus in shape, such as Figure 6 As shown, the cross-sections of the first main magnet 121, the first auxiliary magnet 122, the second main magnet 221 and the second auxiliary magnet 222 in this embodiment are pentagonal, and the pentagon is not a regular equilateral pentagon. The first magnet array 12 and the second magnet array 22 form a zigzag structure on the side close to each other, and the first magnet array 12 and the second magnet array 22 are flush or not flush on the side away from each other. . As long as a regular zigzag gap is formed between opposite sides of the two arrays, there is no other limitation on the cross section. The magnetization d...

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Abstract

The invention belongs to the technical field of magnetic attraction, and discloses a gravity compensator and a bearing device. The gravity compensator comprises a first magnetic assembly and a second magnetic assembly, wherein the first magnetic assembly comprises a magnetic base and first magnet arrays arranged on the magnetic base, and the first magnet arrays extend in the Z-axis direction; and the second magnetic assembly comprises a magnetic frame and second magnet arrays arranged on the magnetic frame, each second magnet array corresponds to one first magnet array and is arranged opposite to the corresponding first magnet array, a gap is formed between each second magnet array and the corresponding first magnet array, the gaps are of a zigzag structure, and each first magnet array and the corresponding second magnet array are configured to apply magnetic acting force to each other, so that force in the Z-axis direction is generated between the first magnetic assembly and the second magnetic assembly for gravity compensation on the magnetic base or the magnetic frame used for bearing a load. According to the gravity compensator, the gaps are longer, the gap area is larger under the same height, and therefore large-stroke high-load performance is achieved.

Description

technical field [0001] The invention relates to the field of magnetic attraction technology, in particular to a gravity compensator and a carrying device. Background technique [0002] In industrial production, many high-precision industrial equipment such as lithography machines, high-precision machine tools, and robotic arms have high requirements for isolating external vibrations and disturbances to increase production and productivity. Therefore, external disturbances require Suppression isolation through active vibration isolation. Generally speaking, the vibration isolation requirements for high positioning precision equipment have vacuum compatibility, non-contact structure, large output, and low rigidity. [0003] In order to solve this problem, gas-based vibration isolation equipment is currently widely used in active vibration isolation. There are mainly two types of existing vibration isolation equipment. Gravity compensation has the problems of high noise and l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/02F16F6/00
CPCF16F15/03F16F6/00F16F2222/06
Inventor 丁晨阳张佩瑾杨晓峰
Owner FUDAN UNIV
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