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VCSEL and VCSEL surface polarized light film coating device

A polarizing film and coating device technology, which is applied in the field of VCSEL, can solve problems such as processing difficulties, and achieve the effects of improved viewing angle, strong controllability, and high precision

Pending Publication Date: 2021-07-09
浙江焜腾红外科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Processing VCSELs is very difficult

Method used

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  • VCSEL and VCSEL surface polarized light film coating device
  • VCSEL and VCSEL surface polarized light film coating device

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Embodiment Construction

[0016] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0017] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention discloses a VCSEL and a VCSEL surface polarized light film coating device. The surface of the VCSEL is coated with a polarized light film. The film coating device comprises a box body internally provided with a film coating chamber, the box body is connected with vacuum pumping equipment, an evaporation source, an objective table and a diffusion barrel are installed in the film coating chamber, the evaporation source comprises an evaporation material and an evaporation assembly, the evaporation assembly directly faces the objective table, the evaporation assembly and the objective table are located at the two ends of the diffusion barrel correspondingly, and the diffusion barrel is detachably installed in the film coating chamber. The surface of the VCSEL is provided with the polarized light film, the light-emitting structure that a traditional VCSEL only emits vertical light is changed, the light-emitting visual angle of the VCSEL is increased, the VCSEL is used with other instruments and equipment, and the application field of the VCSEL is widened. According to the surface polarized light film coating device, evaporation can be carried out on a VCSEL chip with a small size, and the polarized light film is evaporated on the surface of the VCSEL. The evaporation process is high in controllability and precision.

Description

technical field [0001] The invention belongs to the technical field of VCSEL, in particular to a VCSEL and a VCSEL surface polarizing film coating device. Background technique [0002] Vertical-Cavity Surface-Emitting Laser (Vertical-Cavity Surface-Emitting Laser, referred to as VCSEL, also translated as Vertical Cavity Surface-Emitting Laser) is a semiconductor, and its laser is emitted perpendicular to the top surface, which is different from the edge-emitting type of general laser emitted from the edge. Lasers are different. VCSEL lasers have broad application prospects in the fields of optical communication, optical storage, laser display, and lighting. The characteristic of vertical emission of VCSEL laser can bring advantages that are different from other edge-emitting lasers. However, when the vertically emitted light irradiates an object, its viewing angle is limited, which also limits the application of VCSEL. In addition, the size of VCSEL is generally very smal...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/12G02B5/30H01S5/02255H01S5/183
CPCC23C14/24C23C14/12G02B5/3033H01S5/183
Inventor 詹健龙陶晟王林峰王海成
Owner 浙江焜腾红外科技有限公司