A multi-step electrostatic probe probe
An electrostatic probe and multi-step technology, which is applied in the field of electrostatic probes, can solve the problems of multi-step probes with large volume, large influence of plasma, and no simultaneous measurement, etc., to reduce mutual shielding and signal interference, reduce the number of needles, The effect of reducing the impact
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Embodiment 1
[0043] like figure 1 As shown, a multi-step electrostatic probe probe includes a graphite sheath 10, a first dual probe 1, a second dual probe 2, a first floating potential probe 3, a second floating potential probe 4, three floating potential probes 7, a fourth floating potential probe 8, a fifth floating potential probe 9, a first Mach probe 5 and a second Mach probe 6;
[0044] The top of the graphite sheath 9 is in a stepped structure, and the stepped structure includes a radial first stepped surface, a radial second stepped surface and a radial third stepped surface, and the radial second stepped surface and the radial first stepped surface. The heights of the three stepped surfaces are all lower than the radial first stepped surface, and the radial positions of the radial second stepped surface and the radial third stepped surface are different;
[0045] The tops of the first dual probe 1 and the second dual probe 2 are annularly distributed on the radial first step sur...
Embodiment 2
[0052] like figure 1 As shown, this embodiment is based on Embodiment 1, a multi-step electrostatic probe probe, the first dual probe 1, the second dual probe 2, the first floating potential probe 3, the second dual probe The top needles of the floating potential probe 4, the third floating potential probe 7, the fourth floating potential probe 8, the fifth floating potential probe 9, the first Mach probe 5 and the second Mach probe 6 have the same structure; The first dual probe 1, the second dual probe 2, the first floating potential probe 3, the second floating potential probe 4, the third floating potential probe 7, the fourth floating potential probe 8, the fifth floating potential probe The diameters of the top needles of the floating potential probe 9 , the first Mach probe 5 and the second Mach probe 6 are all 2 mm to 4 mm.
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