Crystal pulling device for mos scene effect tube

Abstract

The invention relates to the related technical field of semiconductor production, and discloses a crystal pulling device for a mos scene effect tube, wherein the device comprises a support, a control device is fixedly mounted in the middle of one side of the support, an upper heat pipe is fixedly mounted at the top of the support, a line pipe is fixedly mounted on the side wall of the upper heat pipe, and the top end of the line pipe and the top of the support are fixedly mounted; and the bottom of the upper heat pipe is in threaded connection with a lower heat pipe. The line pipe is electrified with alternating current, so that heat in an inner cavity of the upper heat pipe is increased through the line pipe, and necessary temperature is provided for the crystal pulling pipe; and meanwhile, a magnetic block enables the crystal pulling pipe to move up and down in the inner cavity of the upper heat pipe through repeated attraction and repulsion between an alternating magnetic field generated by the line pipe and the magnetic block; the raw materials in the crystal pulling pipe are mixed through continuous oscillation, the surface of the crystal pulling pipe is in contact with heat in the upper heat pipe at the same time through up-down movement of the crystal pulling pipe, and finally the purposes of mixing the raw materials through up-down oscillation and uniform heating are achieved.

Description

technical field [0001] The invention relates to the technical field related to semiconductor production, in particular to a mos scene effect transistor crystal pulling device. Background technique [0002] MOS scene effect transistor is a metal-oxide-semiconductor scene effect transistor. This device has two electrodes, one is metal, the other is external silicon (semiconductor material), and they are separated by a thin layer of silicon dioxide. Separation, among which semiconductor materials are indispensable, and crystal pulling refers to the process of arranging the molecules inside it when manufacturing crystal ingots. A balanced environment is conducive to the orderly arrangement of molecules in the ingot. [0003] When pulling the crystal, it mainly places the crystal pulling tube in the crystal pulling furnace, and provides a certain temperature through the crystal pulling furnace, so that a columnar crystal rod is formed in the crystal pulling tube, and is used for...

AI Technical Summary

Problems solved by technology

[0006] In view of the deficiencies in the use of the existing tube crystal pulling device proposed in the background technology, the present invention provides a mos scene effect tube crystal pulling device, which has the functions of mixing and uniform heating of raw materials by up and down oscillations, reducing the intensity of up and down oscillations and strengthening raw materials The advantage of uniform mixing solves the technical problems raised in the above-mentioned background technology

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