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A mos field effect transistor crystal pulling device

A field effect tube and heat pipe technology, applied in the field of mos field effect tube crystal pulling device, to achieve the effect of enhancing the mixing effect

Active Publication Date: 2021-12-03
SHENZHEN KING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the deficiencies in the use of the existing tube crystal pulling device proposed in the background technology, the present invention provides a mos field effect transistor crystal pulling device, which has the functions of mixing raw materials with up and down oscillations and uniform heating, reducing the intensity of up and down oscillations and strengthening raw materials The advantage of uniform mixing solves the technical problems raised in the above-mentioned background technology

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  • A mos field effect transistor crystal pulling device
  • A mos field effect transistor crystal pulling device
  • A mos field effect transistor crystal pulling device

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Embodiment Construction

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0023] see Figure 1-6 , a mos field effect transistor crystal pulling device, including a support 1, through which the whole device is fixed and supported, and at the same time, a control device 2 is fixedly installed in the middle of one side of the support 1, and at the same time, An upper heat pipe 3 is fixedly installed on the top of the support 1, thereby providing a necessary chamber for the crystal pulling process through the upper heat pipe 3, forming...

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Abstract

The invention relates to the technical field related to semiconductor production, and discloses a mos field effect transistor crystal pulling device, which includes a support, a control device is fixedly installed in the middle of one side of the support, and an upper heat pipe is fixedly installed on the top of the support , the side wall of the upper heat pipe is fixedly installed with a wire pipe, and the top of the wire pipe is fixedly installed with the top of the support, and the bottom of the upper heat pipe is threadedly connected with a lower heat pipe. The wire tube of the present invention passes an alternating current, so that the heat in the inner cavity of the heat pipe is increased through the wire tube, and the necessary temperature is provided for pulling the crystal tube. At the same time, the alternating magnetic field generated by the wire tube and the magnetic block repeatedly The magnetic block makes the pull transistor move up and down in the inner cavity of the upper heat pipe, not only realizes the mixing of raw materials in the pull transistor through continuous oscillation, but also causes the surface of the pull transistor to be in contact with the upper heat pipe at the same time through the up and down movement of the pull transistor. Contact with medium heat, and finally achieve the purpose of shaking the raw materials up and down and mixing them evenly.

Description

technical field [0001] The invention relates to the technical field related to semiconductor production, in particular to a mos field effect transistor crystal pulling device. Background technique [0002] MOS scene effect transistor is a metal-oxide-semiconductor scene effect transistor. This device has two electrodes, one is metal, the other is external silicon (semiconductor material), and they are separated by a thin layer of silicon dioxide. Separation, among which semiconductor materials are indispensable, and crystal pulling refers to the process of arranging the molecules inside it when manufacturing crystal ingots. A balanced environment is conducive to the orderly arrangement of molecules in the ingot. [0003] When pulling the crystal, it mainly places the crystal pulling tube in the crystal pulling furnace, and provides a certain temperature through the crystal pulling furnace, so that a columnar crystal rod is formed in the crystal pulling tube, and is used for...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/00C30B28/10C30B15/20
CPCC30B15/00C30B15/20C30B28/10
Inventor 王朝刚
Owner SHENZHEN KING TECH CO LTD
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