Correction method, storage medium and projection system for grayscale nonlinearity of digital projector
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TZTEK TECH
- Publication Date
- 2022-06-21
Smart Images

Figure 1 
Figure 2 
Figure 3
Abstract
Description
technical field
[0001] The invention relates to the technical field of image data processing and optical three-dimensional measurement, in particular to a method for calibrating gray scale nonlinearity of a digital projector, a storage medium and a projection system, which can be applied to three-dimensional measurement in the process of IC component packaging and semiconductor silicon wafer processing and manufacturing. Quantitative testing, etc. Background technique
[0002] The fringe projection 3D measurement technology is one of the research hotspots in the field of optical 3D measurement, which has the advantages of non-contact, high speed and high accuracy. During measurement, a digital projector is generally used to project the sinusoidally varying fringes on the surface of the object to be measured, and then the phase information in the field of view is obtained from the image of the deformation fringes that are height-modulated by the object to be measured. 3D hei...