Novel 3-PSS three-dimensional translation flexible parallel micro-motion platform

Abstract

The invention discloses a novel 3-PSS three-dimensional translation flexible parallel micro-motion platform. The platform comprises a rack, three piezoelectric ceramic motion platforms, three movable sliding blocks, flexible spherical hinges, connecting rods and a movable platform, wherein the three sliding blocks are controlled to do linear motion in the vertical direction on the three piezoelectric ceramic motion platforms respectively; and the connecting rods and the sliding blocks are connected through the flexible spherical hinges, the movable platform and the connecting rods are connected through the flexible spherical hinges, the two connecting rods on each sliding block form a parallelogram, the connecting rods act on the movable platform and finally drive the movable platform to move, and accurate movement of the movable platform of a mechanism is achieved. The flexible hinges have a series of advantages of no clearance, no friction, no lubrication and the like, so that the mechanism constructed by using the flexible hinges as passive pairs has the characteristics of high resolution and high repeated positioning precision. The novel 3-PSS flexible parallel micro-motion platform can provide micron-order motion precision in a working space.

Description

technical field [0001] The invention belongs to the technical field of micro-operation equipment, and relates to a novel micron-level precision positioning 3-PSS three-dimensional translation flexible parallel micro-motion platform. Background technique [0002] With the development of nanotechnology, the micro-operation system came into being, and the micro-motion platform as a kind of micro-operation equipment has been greatly developed. The micro-motion platform is a kind of micron operation equipment formed after introducing parallel robot technology into the microscopic field. In addition to the basic characteristics of a robot, it can also adapt to unknown operating environments, and realize the manufacturing, positioning, and assembly of micron-scale manipulated objects by integrating precision instrument technology. [0003] With the gradual improvement of robot technology, various industries generally require micron-level or nanometer-level motion accuracy, resolut...

AI Technical Summary

Problems solved by technology

However, for a robot system that uses flexible hinges as kinematic pairs, the displacement at the end is obtained by the drive displacement of each branch chain through the deformation and transmission of the flexible hinge. Since the deformation of the flexible hinge is extremely limited, this will inevitably lead to a relatively narrow working space at the end of the robot. , the working space at the end is mostly in the cubic micron level

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