A kind of diamond processing equipment

A processing equipment and diamond technology, applied in the diamond field, can solve problems such as being difficult to be found, affecting the quality of diamond films, and temperature effects.

Active Publication Date: 2022-05-10
杭州超然金刚石有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, in the existing vapor deposition furnaces, the hot wires are generally arranged therein, and during operation, the entire vapor deposition furnace is in a closed state. At this time, if one or several hot wires are fused, it is difficult to be found. If you continue to process and manufacture, because the hot wire is fused, the temperature at the place will be affected, which will affect the quality of the final diamond film, so it needs to be improved.

Method used

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  • A kind of diamond processing equipment
  • A kind of diamond processing equipment
  • A kind of diamond processing equipment

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Embodiment

[0029] Such as figure 1 and figure 2 As shown, this embodiment provides a diamond processing equipment, including a vapor deposition furnace 1, and a hot wire mechanism 2 arranged in the vapor deposition furnace 1, the hot wire mechanism 2 includes a carrier, and several Hot wire 20 on. As for the vapor deposition furnace 1, there are a large number of documents published in the prior art, so its specific structure will not be described in detail here.

[0030] Such as figure 2 As shown, the entire carrier is a frame structure, and it at least includes a set of first installation beams 21 and second installation beams 22 arranged in parallel.

[0031] The first installation beam 21 is provided with a number of clips 23 for the heating wire 20 to bypass, wherein the number of clips 23 is the same as that of the heating wire 20, and the number of clips 23 is evenly distributed along the length direction of the first installation beam 21 .

[0032] combine image 3 As sho...

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Abstract

The present invention relates to the field of diamond technology, in particular, to a diamond processing equipment, including a vapor deposition furnace, and a hot wire mechanism installed in the vapor deposition furnace, the hot wire mechanism includes a carrier, and several The hot wire on the carrier, the carrier includes a first installation beam and a second installation beam arranged in parallel, the first installation beam is provided with a number of clips for the heating wire to bypass, wherein the clips are perpendicular to the The length direction of the first installation beam is slidably installed on the first installation beam; an elastic piece is arranged between the first installation beam and the clip, and the clip is always kept sliding to the outside of the first installation beam through the elastic piece Trend; the hot wire mechanism also includes a detection piece arranged on the first installation beam or clip, when the elastic piece returns to its original position, the detection piece is triggered and sends a signal feedback to the control center. The invention can play a reminder effect when the hot wire is blown.

Description

technical field [0001] The present invention relates to the field of diamond technology, in particular, to a diamond processing equipment. Background technique [0002] The diamond film is mainly prepared by vapor deposition in a vapor deposition furnace. The main principle is that the mixed gas composed of carbon source and hydrogen passes through the metal hot wire, and methyl and hydrogen atoms are decomposed in the high temperature field formed by the hot wire, and, Under a certain pressure in the cavity, a large number of methyl groups interact with the substrate surface at a suitable temperature and the recombination reaction between the methyl groups makes hybrid hydrocarbon groups generated in the high temperature field, and these hydrocarbon groups are on the substrate. surface deposition to form a diamond film on the substrate surface. [0003] However, in the existing vapor deposition furnaces, the hot wires are generally arranged therein, and during operation, t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27C23C16/52
CPCC23C16/271C23C16/279
Inventor 余斌余海粟朱轶方陆骁莹
Owner 杭州超然金刚石有限公司
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