An automated coating system

Abstract

The invention provides an automatic coating system, comprising: a vacuum chamber device, a transfer chamber device, a suspension operation room, a rotating frame and a rotating frame driving device are arranged in the vacuum chamber device, and a hanging plate is arranged on the rotating frame; the transfer chamber device A manipulator device and a first rotating device are arranged inside; a rail changing device and a second rotating device are arranged in the suspension operation room; the rail changing device is used to connect the transfer chamber and the suspension operation chamber; when the transfer chamber is exchanged with the vacuum chamber It is in a vacuum state, and it is in an atmospheric state during the exchange operation with the suspension operation room; among them, the coating time of the vacuum chamber, the vacuuming time of the transfer chamber, the exchange time of the transfer chamber and the vacuum chamber, and the vacuum break of the transfer chamber The sum of the time and the exchange time of the transfer chamber and the suspension operation chamber is equal to the operation time of the suspension operation chamber. The invention can improve coating efficiency and coating quality, and occupies less floor space.

Description

technical field [0001] The invention relates to the field of optical technology coating, in particular to an efficient automatic coating system. Background technique [0002] In the field of optical technology coating, improving the efficiency and quality of coating and expanding the scope of application of coating have always been the goals pursued by the field of vacuum coating technology. [0003] Figure 1 to Figure 3 It shows a current coating system. As shown in the figure, the coating system mainly includes a process vacuum chamber 1, a handling vacuum chamber 2, and an automatic loading and unloading device 20. The finished product in the process chamber passes through the manipulator 9 in a vacuum state. , transfer the hanging boards 10 to the transfer room turret 8, when all the hanging boards are transferred to the transfer room turret, the valve 4 is closed, the air is released, the door 3 is opened, and the door opening position is identified by the door limit s...

AI Technical Summary

Problems solved by technology

[0004] 1. The failure rate of the manipulator in the vacuum state is high, and the frequency of jamming is high;

[0005] 2. Slow tempo and low efficiency;

[0006] 3. High requirements for installation and adjustment;

[0007] 4. The flexibility of the hanging board is low. If the large hanging board is replaced, the entire manipulator and automatic loading and unloading device may need to be changed;

[0008] 5. The positioning of the robot in the automatic loading and unloading device is not accurate, and it is easy to collide with the hanging board, and the hanging board on the automatic assembly line is easy to deviate;

[0009] 6. Large footprint

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