Light beam alignment device and alignment method for ultralow-temperature vacuum environment

Abstract

The invention provides a light beam alignment device and alignment method for an ultralow-temperature vacuum environment. The device comprises an ultralow-temperature vacuum bin body, an alignment target, a vacuum interface, a vacuum program control displacement table, a guide laser module, an alignment device vacuum bin body, a first diaphragm, a second diaphragm, an adjustment laser module and a working light source. The device has the advantages that: 1, no complex optical path or circuit is needed, the structure is simple, and the use is convenient; 2, the applicable wavelength range is wide, and wavelength limitation is avoided; 3, the light beam alignment precision is high; and 4, the incident light power is not changed in the alignment process, stray light is not introduced, and the test precision of subsequent light power measurement and the like is not influenced.

Description

technical field [0001] The invention belongs to the technical field of beam alignment, and in particular relates to a beam alignment device and an alignment method used in an ultra-low temperature vacuum environment. Background technique [0002] Beam alignment is an important problem in the process of optical precision measurement and optical metrology, especially when it involves the alignment of non-visible light beams in special environments such as ultra-low temperature vacuum, the alignment is more difficult. The existing beam alignment method generally uses a four-quadrant detector supplemented by related reflection, spectroscopic and other optical devices, and judges the beam alignment by monitoring the readings of the four-quadrant detector. Since most of the four-quadrant detectors are Si detectors, they can only be used for beam alignment in the 200nm-1100nm band. For other wave bands such as ultraviolet and infrared, the existing method generally uses a 632.8nm ...

AI Technical Summary

Problems solved by technology

[0004] The technical problems to be solved by the present invention are: 1. Propose a beam alignment method and alignment device suitable for ultra-low temperature vacuum environment; 2. The existing beam alignment method based on four-quadrant detectors is only applicable to the 200nm-1100nm band For the shortcomings of beam alignment, a universal beam alignment method without wavelength range limitation is proposed; 3. Aiming at the problems of difficult alignment and debugging and low precision of traditional beam alignment methods, a compact structure and strong versatility are proposed. Advanced beam alignment device, which simplifies the difficulty of alignment debugging and improves alignment accuracy; 4. Realize high-precision alignment of the incident beam without passing through, monitoring stray light, and changing the optical power of the alignment beam, and improving the follow-up light beam. Accuracy of measurements such as power

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