High-speed ellipsometry method and device based on optimization model
A technology for optimizing models and measurement methods, applied in the field of ellipsometry, can solve problems affecting the accuracy of measurement results, etc., and achieve the effect of suppressing system deviation and improving robustness
Active Publication Date: 2021-08-31
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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[0003] When the harmonic component extraction method is used for ellipsometry, the relevant parameters of the PEM (Photo-elastic Modulator, photoelastic modulator), such as the maximum modulation optical path difference and static phase delay, are all fixed constants by default. In practical applications, these system parameters are usually affected by changes in the external environment, such as temperature changes, excitation signal peak-to-peak changes, incident light direction deviation, etc., and are not constant. Once these effects accumulate to a certain extent, they will be will affect the accuracy of the measurement results
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[0030] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.
[0031]Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The figures are not drawn to scale, with certain details exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions / layers with different shapes, s...
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The invention provides a high-speed ellipsometry method and device based on an optimization model. The method comprises steps of building a system model of an ellipsometry system which comprises a polarizer, a photoelastic modulator PEM and a polarization analyzer; substituting the Stokes vector of the incident light and each system parameter of the ellipsometry system into a system model to obtain an expression of a total light intensity parameter of the output light; and performing logic design of an optimization model according to a nonlinear least square method in combination with an expression of a total light intensity parameter. According to the method, the data are processed by a preset optimization model to obtain the actual value of each system parameter in the ellipsometry system, and the Stokes vector of the emergent light is obtained through inversion calculation according to the actual value of each system parameter, so compared with the prior art, the ellipsometry process is converted into an optimization problem to be solved, the influence caused by system deviation can be inhibited, and robustness of the measurement system is improved.
Description
technical field [0001] The present disclosure relates to the technical field of ellipsometry, in particular to a high-speed ellipsometry method and device based on an optimal model. Background technique [0002] Existing photoelastic modulation high-speed ellipsometry methods usually use the method of harmonic component extraction. In this method, a digital lock-in amplifier is used to extract the amplitude of the low-order harmonic component in the light intensity modulation signal to calculate the Stokes vector, and the high-frequency component is discarded. The characteristic of this method is that the amount of data processing is small, and the implementation is more intuitive, fast, and has better versatility. [0003] When the harmonic component extraction method is used for ellipsometry, the relevant parameters of the PEM (Photo-elastic Modulator, photoelastic modulator), such as the maximum modulation optical path difference and static phase delay, are all fixed con...
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IPC IPC(8): G01N21/21
CPCG01N21/211
Inventor 何彤熊伟李超波
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI