Manufacturing method of gas sensor, surface acoustic wave micro-centrifugal device and gas sensor

A gas sensor and surface acoustic wave technology, applied in the field of gas sensing, can solve the problems of low sensitivity and strict requirements for hydrogen sulfide, etc.

Pending Publication Date: 2021-09-10
HUI YU & TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] However, traditional gas sensors are not only demanding on the detection of hydrogen sulfide, but also have low sensitivity

Method used

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  • Manufacturing method of gas sensor, surface acoustic wave micro-centrifugal device and gas sensor
  • Manufacturing method of gas sensor, surface acoustic wave micro-centrifugal device and gas sensor
  • Manufacturing method of gas sensor, surface acoustic wave micro-centrifugal device and gas sensor

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Embodiment Construction

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0032] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the referred device or element must ...

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Abstract

The embodiment of the invention discloses a manufacturing method of a gas sensor, a surface acoustic wave micro-centrifugal device and the gas sensor. The manufacturing method of the gas sensor comprises the following steps: providing a surface acoustic wave micro-centrifugal device, the surface acoustic wave micro-centrifugal device comprises a micro reaction tank, and the micro reaction tank comprises a solution containing a plurality of layers of MXene materials; stripping the multi-layer MXene material, and obtaining a single-layer MXene material; providing a semiconductor gas sensing assembly, and reversely buckling a finger strip sensitive area of the semiconductor gas sensing assembly on the micro reaction tank; and coating the single-layer MXene material on the finger strip sensitive area of the semiconductor gas sensing assembly by using an acoustic flow spin-coating method to obtain the gas sensor. The gas sensor manufactured by the scheme can effectively improve the sensitivity of hydrogen sulfide detection.

Description

technical field [0001] The present application relates to the technical field of gas sensing, in particular to a method for manufacturing a gas sensor, a surface acoustic wave microcentrifuge device and a gas sensor. Background technique [0002] Hydrogen sulfide is a toxic gas with the smell of rotten eggs. It contains strong neurotoxins and has a strong stimulating effect on mucous membranes. Exposure can cause symptoms such as ophthalmia, chemical pneumonia, pulmonary edema, upper gastrointestinal discomfort, and central nervous system. , Inhalation of a small amount of high-concentration hydrogen sulfide can be fatal in a short time. Studies have shown that hydrogen sulfide may play an important role in the damage of lung function in the pathogenesis of acute and chronic lung diseases. Therefore, the concentration of hydrogen sulfide in the breath can play a key role in the diagnosis of human inflammation and related diseases. [0003] However, traditional gas sensors ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00B05D7/24B05D1/00
CPCG01N27/00B05D7/24B05D1/005
Inventor 黄秀松陈泽荣肖健建罗邦雄赵鹤玲曾小红
Owner HUI YU & TECH
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