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Substrate carrier, film forming apparatus, substrate carrier conveying method, and film forming method

A technology of substrate carrier and film forming device, which is applied in conveyor objects, transportation and packaging, electric solid state devices, etc., can solve the problems of unresearched specific structure of substrate carrier and unresearched cycle, etc.

Active Publication Date: 2021-09-14
CANON TOKKI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In Patent Document 1, it is described that the substrate carrier after the substrate is separated is circulated through the return line, but it is not studied how to circulate it specifically.
In addition, the specific structure of the substrate carrier has not been studied

Method used

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  • Substrate carrier, film forming apparatus, substrate carrier conveying method, and film forming method
  • Substrate carrier, film forming apparatus, substrate carrier conveying method, and film forming method
  • Substrate carrier, film forming apparatus, substrate carrier conveying method, and film forming method

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Embodiment approach 1

[0034] Hereinafter, with reference to the drawings, an exemplary embodiment of the present invention will be described in detail based on an example. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to these unless otherwise specified.

[0035] refer to Figure 1 to Figure 13 , the substrate carrier, the film-forming apparatus, the film-forming method, and the manufacturing method of the electronic device according to the embodiment of the present invention will be described. In the following description, the mask mounting apparatus etc. which are provided in the apparatus for manufacturing an electronic device are demonstrated as an example. In addition, as a film-forming method for manufacturing an electronic device, a case where a vacuum vapor deposition method is employed will be described as an example. However, the present inve...

Embodiment approach 2

[0141]

[0142] A method of manufacturing an electronic device using the above-mentioned substrate processing apparatus will be described. Here, as an example of an electronic device, a case of an organic EL element used in a display device such as an organic EL display device will be described as an example. It should be noted that the electronic device of the present invention is not limited to this, and may be a thin-film solar cell or an organic CMOS image sensor. In the present embodiment, there is a step of forming an organic film on the substrate 5 using the above-described film forming method. In addition, there is a step of forming a metal film or a metal oxide film after forming an organic film on the substrate 5 . The structure of the organic EL display device 600 obtained by such steps will be described below.

[0143] Figure 14 (a) shows an overall view of the organic EL display device 600, Figure 14 (b) shows the cross-sectional structure of one pixel. l...

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Abstract

The invention provides a substrate carrier, a film forming apparatus, a substrate carrier conveying method, and a film forming method. In the film forming apparatus that forms a film while holding and conveying a substrate by a substrate carrier, the efficiency when circulating the substrate carrier can be improved. The substrate carrier includes: a plate-shaped member that holds a substrate; a pair of first components which are respectively fixed on a first side and a second side of the plate-shaped member along the first direction, and respectively extend along the first direction; and a pair of second members that are fixed to a third side and a fourth side of the plate-shaped member, respectively, in a second direction intersecting the first direction, and that are provided so as to extend in the second direction, respectively.

Description

technical field [0001] The present invention relates to a substrate carrier, a film forming apparatus, a method for conveying the substrate carrier, and a film forming method. Background technique [0002] As a method of manufacturing an organic EL display, there is known a mask film-forming method of forming a film of a predetermined pattern by forming a film on a substrate through a mask having openings formed in a predetermined pattern. In the mask film-forming method, after positioning the mask and the substrate, the mask and the substrate are brought into close contact with each other to form a film. [0003] Patent Document 1 describes that the substrate is held on a clamping plate (also referred to as a “substrate carrier”), and the substrate is transported together with the clamping plate. Thereby, even a large-area substrate with a large deflection can be conveyed. Furthermore, Patent Document 1 describes that the substrate and the mask are bonded to each other to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677C23C14/56H01L21/68H01L51/56
CPCC23C14/568H01L21/682H01L21/67766H01L21/67742H10K71/00C23C14/50C23C14/042C23C14/24C23C14/34H01L21/67346H10K71/166
Inventor 铃木健太郎
Owner CANON TOKKI CORP