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Silicon wafer guiding system

A technology of silicon wafers and guides, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, sustainable manufacturing/processing, etc. It can solve the problem that the structural method cannot meet the production capacity and quality requirements, and the conveyor belt is prone to belt marks and pollution, processing The process is becoming more and more complicated, and the effect of improving the work efficiency of the guide sheet, realizing fine control, and improving the degree of automation control

Active Publication Date: 2021-09-14
LAPLACE (WUXI) SEMICON TECH CO LTD
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Problems solved by technology

[0002] The flower basket is an important tool in the transportation of silicon wafers. The number of silicon wafers placed in different flower baskets is different and the spacing of the silicon wafers in the flower basket is also different. As the process becomes more and more complex, the requirements for wafer loading and unloading devices are getting higher and higher, and the efficiency requirements are also getting higher and higher. The original wafer guide mechanism is completed by the conveyor belt mechanism, and the silicon wafers are sequentially exported. The guide efficiency low, and the silicon wafer contact conveyor belt is prone to belt marks and pollution, the original structure can not meet the production capacity and quality requirements, the invention effectively solves this problem

Method used

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  • Silicon wafer guiding system
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Embodiment 1

[0036] Such as Figure 1-12 As shown, a silicon chip guide system includes a conveying device, a buffer device 2, a storage device, a taking device 4 and a splicing device, and the conveying device, the buffer device 2 and the storage device are used for empty flower baskets or loaded silicon wafers. The flower basket is transported, and the sheet taking device 4 is used for transferring silicon wafers between the storage device and the splicing device.

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Abstract

A silicon wafer guiding system disclosed by the present invention comprises a conveying device, a temporary storage device, a storage device, a wafer taking device and a wafer receiving device, the conveying device comprises a feeding conveying mechanism and a discharging conveying mechanism, the feeding conveying mechanism conveys a basket loaded with unprocessed silicon wafers to the temporary storage device, the discharging conveying mechanism conveys empty flower baskets input by the temporary storage device or flower baskets loaded with processed silicon wafers, the conveying device, the temporary storage device and the storage device convey the empty flower baskets or the flower baskets loaded with the silicon wafers, and the wafer taking device is used for conveying the silicon wafers between the storage device and the wafer receiving device. According to the invention, the automatic feeding process of conveying the unprocessed silicon wafers from the flower basket to the wafer receiving device and the automatic discharging process of guiding the processed silicon wafers from the wafer receiving device to the flower basket are realized; and an upper wafer receiving mechanism and a lower wafer receiving mechanism as well as the cooperative operation of the upper wafer receiving mechanism and the lower wafer receiving mechanism are adopted, so that the wafer taking device is always in a wafer guiding state, and the wafer guiding working efficiency is improved to the maximum extent.

Description

technical field [0001] The invention belongs to the photovoltaic field and relates to a silicon chip guide system. Background technique [0002] The flower basket is an important tool in the transportation of silicon wafers. The number of silicon wafers placed in different flower baskets is different and the spacing of the silicon wafers in the flower basket is also different. As the process becomes more and more complex, the requirements for wafer loading and unloading devices are getting higher and higher, and the efficiency requirements are also getting higher and higher. The original wafer guide mechanism is completed by the conveyor belt mechanism, and the silicon wafers are sequentially exported. The guide efficiency It is relatively low, and the silicon wafer contact conveyor belt is prone to belt marks and pollution, and the original structure cannot meet the production capacity and quality requirements. The present invention effectively solves this problem. Conten...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L31/18
CPCH01L21/67766H01L21/67778H01L31/18Y02P70/50
Inventor 林佳继周欢时祥
Owner LAPLACE (WUXI) SEMICON TECH CO LTD