Unlock instant, AI-driven research and patent intelligence for your innovation.

Electroplating method capable of accurately controlling thickness of plating layer

A technology for precise control of coating thickness, applied in the electrolysis process, electrolysis components, cells, etc., can solve the problem of uneven distribution of electrode thickness, and achieve the effect of precise thickness control

Pending Publication Date: 2021-09-17
北京世维通科技股份有限公司
View PDF2 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present application aims to provide an electroplating method that precisely controls the thickness of the coating to solve the technical problem of uneven distribution of electrode thickness obtained by the electroplating method in the prior art

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Electroplating method capable of accurately controlling thickness of plating layer
  • Electroplating method capable of accurately controlling thickness of plating layer
  • Electroplating method capable of accurately controlling thickness of plating layer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the simplification of the application, rather than indicating or implying that the referred device or component must have a specific orientation, use a specific orientation construction and operation, therefore should not be construed as limiting the application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

[0037] In the description of this application, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses an electroplating method capable of accurately controlling the thickness of a plating layer. The electroplating method comprises the steps: manufacturing a patterned seed layer on a substrate to be plated; according to an electrode thickness distribution gradient obtained by electroplating on a non-patterned seed layer, dividing the patterned seed layer on the substrate to be plated into at least two independent areas, and each independent area corresponds to a distribution area of one thickness interval; manufacturing an electroplating mask pattern on the substrate to be plated and the patterned seed layer; and sequentially electroplating metal layers on the different independent areas on the to-be-electroplated substrate with the electroplating mask pattern and the patterned seed layer in order to form metal electrodes. According to the scheme, the patterned seed layer on the substrate to be plated is divided into the at least two independent areas according to the electrode thickness distribution gradient obtained by electroplating on the non-patterned seed layer, electroplating control is conducted on the different independent areas, and therefore the thicknesses of the metal layers obtained through electroplating on the different independent areas meet the requirement, and the thicknesses of different areas of the finally obtained metal electrodes are accurately controlled.

Description

technical field [0001] The invention relates to the technical field of electroplating technology for metal electrodes, in particular to an electroplating method for precisely controlling the thickness of a coating. Background technique [0002] Electroplating is a traditional process commonly used in the field of circuit board manufacturing, MEMS manufacturing, and IC manufacturing. It is usually used to make metal interconnection structures to realize electrical connections between components and between layers of multilayer wiring circuits. [0003] In most application fields, the uniformity of electrode thickness is highly required, but the electrode thickness uniformity obtained by the existing electroplating process is poor, the electrode thickness in some areas is too large, and the electrode thickness in some areas is too small. It cannot meet the scene requirements for high uniformity of electrode thickness. Contents of the invention [0004] The embodiment of the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C25D5/02C25D5/10C25D5/16C25D5/18C25D21/12
CPCC25D5/022C25D5/16C25D5/18C25D21/12C25D5/10
Inventor 王功王旭阳李雪征李俊慧冯亚丽郭育梅贾赫
Owner 北京世维通科技股份有限公司